From latta at snf.stanford.edu  Tue Dec  4 13:42:04 2007
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Tue, 4 Dec 2007 13:42:04 -0800
Subject: Problem tylan1 SNF 2007-12-04 13:42:04: mfc alarm
Message-ID: <mailman.501.1357938807.25926.tylan1-pcs@snf.stanford.edu>

N2 too high (after program was completed)- 7.06lpm



From latta at snf.stanford.edu  Tue Dec  4 17:09:24 2007
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Tue, 4 Dec 2007 17:09:24 -0800
Subject: Comment tylan1 SNF 2007-12-04 17:09:23: Dec Process Quals
Message-ID: <mailman.502.1357938807.25926.tylan1-pcs@snf.stanford.edu>

WET900  00:39:00  50 wafer spread
Average all wafers = 883A  (expect about 920A)
Within-a-wafer = 1.4%  (expect less than 5%)
Wafer-to-wafer = 1.1% (expect less than 5%)



From latta at snf.stanford.edu  Tue Dec  4 17:09:39 2007
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Tue, 4 Dec 2007 17:09:39 -0800
Subject: Comment tylan1 SNF 2007-11-02 09:48:19: Nov Process Quals
Message-ID: <mailman.503.1357938807.25926.tylan1-pcs@snf.stanford.edu>

to the archives



From tberg at snf.stanford.edu  Thu Dec  6 06:04:30 2007
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Thu, 6 Dec 2007 06:04:30 -0800
Subject: Problem tylan1 SNF 2007-12-04 13:42:04: mfc alarm
Message-ID: <mailman.504.1357938807.25926.tylan1-pcs@snf.stanford.edu>

Adjusted recipe



From kghadiri at snf.stanford.edu  Sun Dec  9 17:23:32 2007
From: kghadiri at snf.stanford.edu (kghadiri at snf.stanford.edu)
Date: Sun, 9 Dec 2007 17:23:32 -0800
Subject: Problem tylan1 SNF 2007-12-09 17:23:31: mfs alarm
Message-ID: <mailman.505.1357938807.25926.tylan1-pcs@snf.stanford.edu>

press "alarm ack" twice but the alarm kept sounding. 



From rissman at snf.stanford.edu  Tue Dec 11 09:14:08 2007
From: rissman at snf.stanford.edu (rissman at snf.stanford.edu)
Date: Tue, 11 Dec 2007 09:14:08 -0800
Subject: Comment tylan1 SNF 2007-12-11 09:14:07: mfs alarm
Message-ID: <mailman.506.1357938807.25926.tylan1-pcs@snf.stanford.edu>

Ray cleaned pot with contact cleaner, adjusted zero, did auto zero routine.  So far has not been alarming.



From mtang at snf.stanford.edu  Thu Dec 13 09:10:49 2007
From: mtang at snf.stanford.edu (mtang at snf.stanford.edu)
Date: Thu, 13 Dec 2007 09:10:49 -0800
Subject: Problem tylan1 SNF 2007-12-09 17:23:31: mfs alarm
Message-ID: <mailman.507.1357938807.25926.tylan1-pcs@snf.stanford.edu>

No reported incidents since Ray's repair.