Comment tylan1 SNF 2007-12-04 17:09:23: Dec Process Quals

latta at snf.stanford.edu latta at snf.stanford.edu
Tue Dec 4 17:09:24 PST 2007


WET900  00:39:00  50 wafer spread
Average all wafers = 883A  (expect about 920A)
Within-a-wafer = 1.4%  (expect less than 5%)
Wafer-to-wafer = 1.1% (expect less than 5%)




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