From latta at snf.stanford.edu Thu Feb 1 17:20:44 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 1 Feb 2007 17:20:44 -0800 Subject: Comment tylan1 SNF 2007-01-03 16:52:30: Jan process quals Message-ID: to the archives! From latta at snf.stanford.edu Thu Feb 1 17:22:14 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 1 Feb 2007 17:22:14 -0800 Subject: Comment tylan1 SNF 2007-02-01 17:22:14: Feb process quals Message-ID: WET900 00:39:00 50 wafer spread Average all wafers = 969A Within-a-wafer = 1.5% Wafer-to-wafer = 4.7% From fengj at snf.stanford.edu Sat Feb 10 22:08:06 2007 From: fengj at snf.stanford.edu (fengj at snf.stanford.edu) Date: Sat, 10 Feb 2007 22:08:06 -0800 Subject: Problem tylan1 SNF 2007-02-10 22:08:06: No H2 flow when doing WET1100 Message-ID: From seymour at snf.stanford.edu Mon Feb 12 08:12:20 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 12 Feb 2007 08:12:20 -0800 Subject: Problem tylan1 SNF 2007-02-10 22:08:06: No H2 flow when doing WET1100 Message-ID: flowed H2 without any flow problems. From mtang at snf.stanford.edu Mon Feb 12 09:15:49 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 12 Feb 2007 09:15:49 -0800 Subject: Problem tylan1 SNF 2007-02-12 09:15:49: Need to run test Message-ID: Want to confirm the H2 flow during an actual recipe run. Maurice will watch. From seymour at snf.stanford.edu Mon Feb 12 12:18:37 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 12 Feb 2007 12:18:37 -0800 Subject: Problem tylan1 SNF 2007-02-12 09:15:49: Need to run test Message-ID: ran wet1100 and H2 flowed at setpoint. No problems found