From gladys at snf.stanford.edu Tue Jan 2 11:15:15 2007 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Tue, 2 Jan 2007 11:15:15 -0800 Subject: Comment tylan1 SNF 2007-01-02 11:15:14: TLCCLEAN IS RUNNING, JAN 2, 2007 Message-ID: From latta at snf.stanford.edu Wed Jan 3 11:52:40 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 3 Jan 2007 11:52:40 -0800 Subject: Problem tylan1 SNF 2007-01-03 11:52:39: loO2 alarm- even w/ cable disconnected... Message-ID: From latta at snf.stanford.edu Wed Jan 3 16:50:42 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 3 Jan 2007 16:50:42 -0800 Subject: Comment tylan1 SNF 2006-12-06 17:08:02: Dec process quals Message-ID: to the archives... From latta at snf.stanford.edu Wed Jan 3 16:50:53 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 3 Jan 2007 16:50:53 -0800 Subject: Comment tylan1 SNF 2007-01-02 11:15:14: TLCCLEAN IS RUNNING, JAN 2, 2007 Message-ID: Done! From latta at snf.stanford.edu Wed Jan 3 16:52:31 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 3 Jan 2007 16:52:31 -0800 Subject: Comment tylan1 SNF 2007-01-03 16:52:30: Jan process quals Message-ID: 50 wafer spread WET900 00:39:00 Average all wafers = 957A Wafer-to-wafer = 0.3% Within-a-wafer = 1.5% From tberg at snf.stanford.edu Wed Jan 10 06:46:12 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 10 Jan 2007 06:46:12 -0800 Subject: Problem tylan1 SNF 2007-01-03 11:52:39: loO2 alarm- even w/ cable disconnected... Message-ID: Zeroed MFC has been ok for 2 days From kevhuang at snf.stanford.edu Mon Jan 15 13:14:28 2007 From: kevhuang at snf.stanford.edu (kevhuang at snf.stanford.edu) Date: Mon, 15 Jan 2007 13:14:28 -0800 Subject: Problem tylan1 SNF 2007-01-15 13:14:28: can't load recipe Message-ID: there is an I/O error when loading recipe into any tube and when checking status From mtang at snf.stanford.edu Tue Jan 16 09:14:27 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 16 Jan 2007 09:14:27 -0800 Subject: Shutdown tylan1 SNF 2007-01-16 09:14:27: Tycom problem Message-ID: From tberg at snf.stanford.edu Tue Jan 16 10:16:47 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 16 Jan 2007 10:16:47 -0800 Subject: Shutdown tylan1 SNF 2007-01-16 09:14:27: Tycom problem Message-ID: tycom ok From kevhuang at snf.stanford.edu Tue Jan 16 13:09:03 2007 From: kevhuang at snf.stanford.edu (kevhuang at snf.stanford.edu) Date: Tue, 16 Jan 2007 13:09:03 -0800 Subject: Problem tylan1 SNF 2007-01-16 13:09:00: TCU I/O error Message-ID: after pressing the run button and the temperature is displayed as 00000. From mdickey at snf.stanford.edu Wed Jan 17 07:35:23 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 17 Jan 2007 07:35:23 -0800 Subject: Comment tylan1 SNF 2007-01-17 07:35:23: source Message-ID: Replaced TransLC source From seymour at snf.stanford.edu Wed Jan 17 12:16:41 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 17 Jan 2007 12:16:41 -0800 Subject: Shutdown tylan1 SNF 2007-01-17 12:16:41: TCU output not getting to SCR's Message-ID: Tube went into a locked state with H2/O2 interlock alarm due to tube below H2 ignition temp. From tberg at snf.stanford.edu Thu Jan 18 06:47:41 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 18 Jan 2007 06:47:41 -0800 Subject: Shutdown tylan1 SNF 2007-01-17 12:16:41: TCU output not getting to SCR's Message-ID: Wrong recipe loaded by TYCOM From tberg at snf.stanford.edu Thu Jan 18 06:48:36 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 18 Jan 2007 06:48:36 -0800 Subject: Comment tylan1 SNF 2007-01-17 07:35:23: source Message-ID: source changed From mtang at snf.stanford.edu Thu Jan 18 09:14:00 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 18 Jan 2007 09:14:00 -0800 Subject: Shutdown tylan1 SNF 2007-01-18 09:13:59: Tycom problem Message-ID: From tberg at snf.stanford.edu Fri Jan 19 12:03:02 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 19 Jan 2007 12:03:02 -0800 Subject: Shutdown tylan1 SNF 2007-01-18 09:13:59: Tycom problem Message-ID: TYCOM back up From latta at snf.stanford.edu Fri Jan 19 12:15:42 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 19 Jan 2007 12:15:42 -0800 Subject: Problem tylan1 SNF 2007-01-15 13:14:28: can't load recipe Message-ID: tycom fixed From latta at snf.stanford.edu Fri Jan 19 12:15:57 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 19 Jan 2007 12:15:57 -0800 Subject: Problem tylan1 SNF 2007-01-16 13:09:00: TCU I/O error Message-ID: tycom fixed