From latta at snf.stanford.edu Thu Nov 1 13:33:17 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 1 Nov 2007 13:33:17 -0700 Subject: Comment tylan1 SNF 2007-10-09 16:28:29: Message-ID: From latta at snf.stanford.edu Thu Nov 1 14:56:24 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 1 Nov 2007 14:56:24 -0700 Subject: Problem tylan1 SNF 2007-11-01 14:56:23: Noticed that O2 during dry ox unstable Message-ID: Didn't get to 2494 (out of 2499) until 2 or so minutes into the dry ox. Never got above 2494sccm and was at 1600'ish for awhile. May have something to do with the thin ox reports.... From latta at snf.stanford.edu Fri Nov 2 09:48:20 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 2 Nov 2007 09:48:20 -0700 Subject: Comment tylan1 SNF 2007-11-02 09:48:19: Nov Process Quals Message-ID: WET900 00:39:00 50 wafer spread Average all wafers = 876A (expect about 920A) Within-a-wafer = 1.6% (expect less than 5%) Wafer-to-wafer = 1.4% (expect less than 5%) From latta at snf.stanford.edu Fri Nov 2 09:48:43 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 2 Nov 2007 09:48:43 -0700 Subject: Comment tylan1 SNF 2007-10-03 17:39:10: Oct Process Quals- good Message-ID: to the archives... From masaharu at snf.stanford.edu Sun Nov 4 09:16:28 2007 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Sun, 4 Nov 2007 09:16:28 -0800 Subject: Problem tylan1 SNF 2007-11-04 09:16:28: H2 MFC error Message-ID: In my WET1050 run, O2HI was okay, instead, H2 flow was not stable and it turns out to be MFC error. Thickness is 50nm thinner than before. From seymour at snf.stanford.edu Mon Nov 5 08:45:10 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 5 Nov 2007 08:45:10 -0800 Subject: Comment tylan1 SNF 2007-11-05 08:45:09: H2 flow error Message-ID: I set O2 to 2500 SCCM and H2 to 100% and flowed them for over 1/2 hour with no flow errors and H2 flow stayed constant towithin +/-2 SCCM. From rostam at snf.stanford.edu Wed Nov 7 11:43:29 2007 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Wed, 7 Nov 2007 11:43:29 -0800 Subject: Problem tylan1 SNF 2007-11-07 11:43:27: tylan1&2 vacuum wand chipped Message-ID: From mdickey at snf.stanford.edu Wed Nov 7 12:49:58 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 7 Nov 2007 12:49:58 -0800 Subject: Problem tylan1 SNF 2007-11-07 11:43:27: tylan1&2 vacuum wand chipped Message-ID: Wand tip replaced From rissman at snf.stanford.edu Tue Nov 13 09:18:33 2007 From: rissman at snf.stanford.edu (rissman at snf.stanford.edu) Date: Tue, 13 Nov 2007 09:18:33 -0800 Subject: Problem tylan1 SNF 2007-11-04 09:16:28: H2 MFC error Message-ID: Ray set O2 to 2500 SCCM and H2 to 100% and flowed them for over 1/2 hour with no flow errors and H2 flow stayed constant towithin +/-2 SCCM. From rissman at snf.stanford.edu Tue Nov 13 09:19:27 2007 From: rissman at snf.stanford.edu (rissman at snf.stanford.edu) Date: Tue, 13 Nov 2007 09:19:27 -0800 Subject: Problem tylan1 SNF 2007-11-01 14:56:23: Noticed that O2 during dry ox unstable Message-ID: Ray set O2 to 2500 SCCM and H2 to 100% and flowed them for over 1/2 hour with no flow errors and H2 flow stayed constant towithin +/-2 SCCM. From rissman at snf.stanford.edu Tue Nov 13 09:19:46 2007 From: rissman at snf.stanford.edu (rissman at snf.stanford.edu) Date: Tue, 13 Nov 2007 09:19:46 -0800 Subject: Comment tylan1 SNF 2007-11-05 08:45:09: H2 flow error Message-ID: Ray set O2 to 2500 SCCM and H2 to 100% and flowed them for over 1/2 hour with no flow errors and H2 flow stayed constant towithin +/-2 SCCM. From rissman at snf.stanford.edu Tue Nov 13 09:20:27 2007 From: rissman at snf.stanford.edu (rissman at snf.stanford.edu) Date: Tue, 13 Nov 2007 09:20:27 -0800 Subject: Problem tylan1 SNF 2007-10-29 14:09:20: actual thickness significantly off from target Message-ID: Ray set O2 to 2500 SCCM and H2 to 100% and flowed them for over 1/2 hour with no flow errors and H2 flow stayed constant towithin +/-2 SCCM. From rissman at snf.stanford.edu Tue Nov 13 09:22:35 2007 From: rissman at snf.stanford.edu (rissman at snf.stanford.edu) Date: Tue, 13 Nov 2007 09:22:35 -0800 Subject: Comment tylan1 SNF 2007-10-09 16:31:04: dry oxidation test run Message-ID: Ray checked out system found loader not going in past first sensor. replaced loader board and check operation. Loaded and ran WET800 with no problems. checked door interlock after run and it is on. tube is up. From kimsangb at snf.stanford.edu Thu Nov 29 13:09:48 2007 From: kimsangb at snf.stanford.edu (kimsangb at snf.stanford.edu) Date: Thu, 29 Nov 2007 13:09:48 -0800 Subject: Problem tylan1 SNF 2007-11-29 13:09:47: MFC Alarm Message-ID: MFC Alarm was on when I came back and the system was in 'ramp down' step of DRY1000 recipe. From seymour at snf.stanford.edu Thu Nov 29 14:04:21 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 29 Nov 2007 14:04:21 -0800 Subject: Comment tylan1 SNF 2007-11-29 14:04:20: MFS ALARM Message-ID: I checked the monoblock MFC zero's and did an auto zero routine. I then checked Hi O2 flow that was reported to be unstable during the last operators usage and it flowed to setpoint and was stable. I will watch the operation of the furnace during the afternoon. From kimsangb at snf.stanford.edu Thu Nov 29 14:15:06 2007 From: kimsangb at snf.stanford.edu (kimsangb at snf.stanford.edu) Date: Thu, 29 Nov 2007 14:15:06 -0800 Subject: Problem tylan1 SNF 2007-11-29 14:15:05: MFC Alarm Message-ID: It looks like MFC alarm affected my previous run. The oxide thickness is 20% thicker than I expected and the in-a-wafer variation was as large as 15%. From rissman at snf.stanford.edu Fri Nov 30 09:10:03 2007 From: rissman at snf.stanford.edu (rissman at snf.stanford.edu) Date: Fri, 30 Nov 2007 09:10:03 -0800 Subject: Problem tylan1 SNF 2007-11-29 13:09:47: MFC Alarm Message-ID: Ray did the following: I checked the monoblock MFC zero's and did an auto zero routine. I then checked Hi O2 flow that was reported to be unstable during the last operators usage and it flowed to setpoint and was stable. I will watch the operation of the furnace during the afternoon. From rissman at snf.stanford.edu Fri Nov 30 09:10:15 2007 From: rissman at snf.stanford.edu (rissman at snf.stanford.edu) Date: Fri, 30 Nov 2007 09:10:15 -0800 Subject: Problem tylan1 SNF 2007-11-29 14:15:05: MFC Alarm Message-ID: Ray did the following: I checked the monoblock MFC zero's and did an auto zero routine. I then checked Hi O2 flow that was reported to be unstable during the last operators usage and it flowed to setpoint and was stable. I will watch the operation of the furnace during the afternoon. From rissman at snf.stanford.edu Fri Nov 30 09:10:36 2007 From: rissman at snf.stanford.edu (rissman at snf.stanford.edu) Date: Fri, 30 Nov 2007 09:10:36 -0800 Subject: Comment tylan1 SNF 2007-11-29 14:04:20: MFS ALARM Message-ID: Ray did the following: I checked the monoblock MFC zero's and did an auto zero routine. I then checked Hi O2 flow that was reported to be unstable during the last operators usage and it flowed to setpoint and was stable. I will watch the operation of the furnace during the afternoon.