From latta at snf.stanford.edu Wed Oct 3 17:39:11 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 3 Oct 2007 17:39:11 -0700 Subject: Comment tylan1 SNF 2007-10-03 17:39:10: Oct Process Quals- good Message-ID: WET900 00:39:00 50 wafer spread Average all wafers = 916A (expect about 920A) Within-a-wafer = 1.3% (expect less than 5%) Wafer-to-wafer = 0.5% (expect less than 5%) From latta at snf.stanford.edu Wed Oct 3 17:42:09 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 3 Oct 2007 17:42:09 -0700 Subject: Comment tylan1 SNF 2007-09-20 16:33:05: Test after loader board replaced- Good! Message-ID: To the archives From seymour at snf.stanford.edu Fri Oct 5 15:35:53 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 5 Oct 2007 15:35:53 -0700 Subject: Problem tylan1 SNF 2007-10-05 15:35:50: hi o2 interlock alarm Message-ID: door interlock door not closed unable to move door in to closed position. avborted run and then opened and closed door. door interlock now on unable to locate a problem with door at this time. talked to user on phone and explained situation. she passed on to coworker her wishes as to her wafers.. From tberg at snf.stanford.edu Mon Oct 8 11:31:38 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 8 Oct 2007 11:31:38 -0700 Subject: Shutdown tylan1 SNF 2007-10-08 11:31:38: Door interlock Problem Message-ID: No O2 When door doesn't know its closed From seymour at snf.stanford.edu Mon Oct 8 11:54:17 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 8 Oct 2007 11:54:17 -0700 Subject: Shutdown tylan1 SNF 2007-10-08 11:31:38: Door interlock Problem Message-ID: tightened boatloader drive cable pully. checked door interlock and it is on. needs test after repair. From maurice at snf.stanford.edu Tue Oct 9 15:18:57 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 9 Oct 2007 15:18:57 -0700 Subject: Shutdown tylan1 SNF 2007-10-09 15:18:56: O2Hi interlock Message-ID: From gunjim at snf.stanford.edu Tue Oct 9 16:28:29 2007 From: gunjim at snf.stanford.edu (gunjim at snf.stanford.edu) Date: Tue, 9 Oct 2007 16:28:29 -0700 Subject: Comment tylan1 SNF 2007-10-09 16:28:29: Message-ID: From gunjim at snf.stanford.edu Tue Oct 9 16:31:05 2007 From: gunjim at snf.stanford.edu (gunjim at snf.stanford.edu) Date: Tue, 9 Oct 2007 16:31:05 -0700 Subject: Comment tylan1 SNF 2007-10-09 16:31:04: dry oxidation test run Message-ID: O2HI did not flow during the oxidation step. Also, ther was unusual sound during boat in and boat out step. From seymour at snf.stanford.edu Wed Oct 10 09:50:21 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 10 Oct 2007 09:50:21 -0700 Subject: Shutdown tylan1 SNF 2007-10-09 15:18:56: O2Hi interlock Message-ID: checked out system found loader not going in past first sensor. replaced loader board and check operation. Loaded and ran WET800 with no problems. checked door interlock after run and it is on. tube is up. From seymour at snf.stanford.edu Wed Oct 10 09:52:59 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 10 Oct 2007 09:52:59 -0700 Subject: Problem tylan1 SNF 2007-10-05 15:35:50: hi o2 interlock alarm Message-ID: found the problem with the door not closing all the way in auto was due to a faulty loader board. I replaced the loader board today and checked operation and then ren recipe WET800 to checket the tube as my BOT. The test completed normally. From mdickey at snf.stanford.edu Thu Oct 11 11:24:29 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 11 Oct 2007 11:24:29 -0700 Subject: Problem tylan1 SNF 2007-10-11 11:24:28: Boat loader Message-ID: The boat loader board seems to have an intermittent problem during boat in step. Please make sure to watch the boat in step. Manually boat in the loader when it stoops to make sure. We will observe problem and work on it as time permits. From mdickey at snf.stanford.edu Thu Oct 11 11:27:52 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 11 Oct 2007 11:27:52 -0700 Subject: Problem tylan1 SNF 2007-10-11 11:24:28: Boat loader Message-ID: This comment was meant for Tylan 4. My mistake. From yenilmez at snf.stanford.edu Mon Oct 29 14:09:21 2007 From: yenilmez at snf.stanford.edu (yenilmez at snf.stanford.edu) Date: Mon, 29 Oct 2007 14:09:21 -0700 Subject: Problem tylan1 SNF 2007-10-29 14:09:20: actual thickness significantly off from target Message-ID: I used wet1000 recipe for 4000A target thickness. The actual thickness turned out to be 3400 +/- 50 A. I ran three wafers in the middle of the boat. The measured thickness was similar on all wafers.