From latta at snf.stanford.edu Wed Sep 5 14:30:45 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 5 Sep 2007 14:30:45 -0700 Subject: Comment tylan1 SNF 2007-08-29 15:29:52: Set Process Quals, pt. 2 Message-ID: Tested again after injector and TC fittings tightened- no luck. See comments for latest results. From latta at snf.stanford.edu Wed Sep 5 14:31:13 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 5 Sep 2007 14:31:13 -0700 Subject: Problem tylan1 SNF 2007-08-30 08:23:16: needs test after repeir. Message-ID: Test completed. Still out of spec.... From latta at snf.stanford.edu Wed Sep 5 14:33:12 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 5 Sep 2007 14:33:12 -0700 Subject: Problem tylan1 SNF 2007-09-05 14:33:12: Tested after fittings tightened- not good Message-ID: WET900 00:39:00 50 wafer spread Average a wafers = 864a Within-a-wafer = 8.6% Wafer-to-wafer = 4.5% From king at snf.stanford.edu Wed Sep 5 15:06:58 2007 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 5 Sep 2007 15:06:58 -0700 Subject: Problem tylan1 SNF 2007-09-05 15:06:57: Nonuniformity - yellow light Message-ID: Tube is showing up as green-lighted even though it's had a problem reported. See if it goes to yellow now... From tberg at snf.stanford.edu Thu Sep 6 13:57:44 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 6 Sep 2007 13:57:44 -0700 Subject: Shutdown tylan1 SNF 2007-09-06 13:57:43: flow issues Message-ID: Gas flow issues shutdown From seymour at snf.stanford.edu Fri Sep 7 12:13:21 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 7 Sep 2007 12:13:21 -0700 Subject: Shutdown tylan1 SNF 2007-09-06 13:57:43: flow issues Message-ID: I went throught the MFS460 flow base and checked flows. found the H2 flow off. replaced op amps and zero pots for H2 and N2. Adjusted all zeros. checked T/C's. Mike checked door and door seal. tube ready for test. From seymour at snf.stanford.edu Fri Sep 7 12:13:42 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 7 Sep 2007 12:13:42 -0700 Subject: Shutdown tylan1 SNF 2007-09-07 12:13:41: Needs test after repair Message-ID: From latta at snf.stanford.edu Fri Sep 7 16:56:11 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 7 Sep 2007 16:56:11 -0700 Subject: Shutdown tylan1 SNF 2007-09-07 16:56:11: Hi O2 alarm during test Message-ID: From latta at snf.stanford.edu Fri Sep 7 16:56:44 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 7 Sep 2007 16:56:44 -0700 Subject: Problem tylan1 SNF 2007-09-05 15:06:57: Nonuniformity - yellow light Message-ID: yep- that worked From latta at snf.stanford.edu Fri Sep 7 16:59:39 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 7 Sep 2007 16:59:39 -0700 Subject: Shutdown tylan1 SNF 2007-09-07 12:13:41: Needs test after repair Message-ID: Test attempted- Hi O2 alarm- are we sure the tube is ready for test? From seymour at snf.stanford.edu Wed Sep 12 09:50:30 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 12 Sep 2007 09:50:30 -0700 Subject: Shutdown tylan1 SNF 2007-09-07 16:56:11: Hi O2 alarm during test Message-ID: checked door sensor wiring from sensor to MFS460 connector P4. Replaced sensor. reinserted all connectors. Completly checked gas flows in flow base. Replaced all MFC opamps. Placed reference flowmeters in line and checked flow calibrations. replaced N2 flow sensor. Ran WET900 for 39 mins as my BOT. No alarms or errors during the BOT. system ready for process test. From seymour at snf.stanford.edu Wed Sep 12 09:51:06 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 12 Sep 2007 09:51:06 -0700 Subject: Shutdown tylan1 SNF 2007-09-12 09:51:06: needs process test after repair Message-ID: From tberg at snf.stanford.edu Wed Sep 12 12:59:37 2007 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 12 Sep 2007 12:59:37 -0700 Subject: Comment tylan1 SNF 2007-09-12 12:59:37: Door Interlock again Message-ID: From latta at snf.stanford.edu Thu Sep 13 16:51:11 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 13 Sep 2007 16:51:11 -0700 Subject: Comment tylan1 SNF 2007-09-12 12:59:37: Door Interlock again Message-ID: yep. From latta at snf.stanford.edu Thu Sep 13 16:51:52 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 13 Sep 2007 16:51:52 -0700 Subject: Shutdown tylan1 SNF 2007-09-12 09:51:06: needs process test after repair Message-ID: Test completed. See next shutdown message.... From latta at snf.stanford.edu Thu Sep 13 16:52:33 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 13 Sep 2007 16:52:33 -0700 Subject: Problem tylan1 SNF 2007-09-05 14:33:12: Tested after fittings tightened- not good Message-ID: New test done after contact clean. See shutdown message. From latta at snf.stanford.edu Thu Sep 13 16:55:15 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 13 Sep 2007 16:55:15 -0700 Subject: Shutdown tylan1 SNF 2007-09-13 16:55:15: Test after contacts cleaned- not good Message-ID: WET900 00:39:00 50 wafer spread Average all wafers = 790A (thinner than last test) Within-a-wafer = 10.3% (worse than last test) Wafer-to-wafer = 3.9% (a little better) Drat! From mdickey at snf.stanford.edu Fri Sep 14 11:11:35 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 14 Sep 2007 11:11:35 -0700 Subject: Comment tylan1 SNF 2007-09-14 11:11:34: Tube pull Message-ID: Tube is going to be pulled for inspection From mdickey at snf.stanford.edu Tue Sep 18 10:59:08 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 18 Sep 2007 10:59:08 -0700 Subject: Comment tylan1 SNF 2007-09-18 10:59:07: Heating up Message-ID: New quartz installed. Currently heatinig up tube. Then will run a TCA clean the over to process to test From seymour at snf.stanford.edu Wed Sep 19 08:47:32 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 19 Sep 2007 08:47:32 -0700 Subject: Comment tylan1 SNF 2007-09-14 11:11:34: Tube pull Message-ID: completed From seymour at snf.stanford.edu Wed Sep 19 08:47:51 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 19 Sep 2007 08:47:51 -0700 Subject: Comment tylan1 SNF 2007-09-18 10:59:07: Heating up Message-ID: tube hot From seymour at snf.stanford.edu Wed Sep 19 08:48:48 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 19 Sep 2007 08:48:48 -0700 Subject: Problem tylan1 SNF 2007-09-19 08:48:47: tlcclean completed Message-ID: needs test From latta at snf.stanford.edu Wed Sep 19 14:11:58 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 19 Sep 2007 14:11:58 -0700 Subject: Problem tylan1 SNF 2007-09-19 08:48:47: tlcclean completed Message-ID: Test completed- see shutdown notice..... From latta at snf.stanford.edu Wed Sep 19 14:12:36 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 19 Sep 2007 14:12:36 -0700 Subject: Shutdown tylan1 SNF 2007-09-13 16:55:15: Test after contacts cleaned- not good Message-ID: See new test results..... From latta at snf.stanford.edu Wed Sep 19 14:15:21 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 19 Sep 2007 14:15:21 -0700 Subject: Shutdown tylan1 SNF 2007-09-19 14:15:21: Test after full tube and quartzware change Message-ID: WET900 00:39:00 50 wafer spread Average all wafers = 815A (slight improvement from last test) Within-a-wafer = 11.7% (worse) Wafer-to-wafer = 4.8% (also worse) Pity, because it is one fine looking furnace- all new.... From seymour at snf.stanford.edu Thu Sep 20 11:51:50 2007 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 20 Sep 2007 11:51:50 -0700 Subject: Comment tylan1 SNF 2007-09-20 11:51:49: latest repair work Message-ID: found boatloader board not doing a high torque dirve after door closes. replaced board with spare. Mike remived loader and replaced seal and then realigned and centered seal on tube end. ran wet900 for BOT. Need test after repair. From latta at snf.stanford.edu Thu Sep 20 16:29:53 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 20 Sep 2007 16:29:53 -0700 Subject: Comment tylan1 SNF 2007-09-20 11:51:49: latest repair work Message-ID: Tested good! See coral comments.... From latta at snf.stanford.edu Thu Sep 20 16:30:42 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 20 Sep 2007 16:30:42 -0700 Subject: Shutdown tylan1 SNF 2007-09-19 14:15:21: Test after full tube and quartzware change Message-ID: That good looking tube is working good now too. See coral comments... From latta at snf.stanford.edu Thu Sep 20 16:33:05 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 20 Sep 2007 16:33:05 -0700 Subject: Comment tylan1 SNF 2007-09-20 16:33:05: Test after loader board replaced- Good! Message-ID: WET900 00:39:00 50 wafer spread Average all wafers = 890A Within-a-wafer = 2.5% Wafer-to-wafer = 0.7%