Shutdown tylan1 SNF 2007-09-07 16:56:11: Hi O2 alarm during test

seymour at snf.stanford.edu seymour at snf.stanford.edu
Wed Sep 12 09:50:30 PDT 2007


checked door sensor wiring from sensor to MFS460 connector P4. Replaced sensor. reinserted all connectors. 
Completly checked gas flows in flow base. Replaced all MFC opamps. Placed reference flowmeters in line and checked flow calibrations. replaced N2 flow sensor. Ran WET900 for 39 mins as my BOT. No alarms or errors during the BOT. system ready for process test.




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