Shutdown tylan1 SNF 2007-09-13 16:55:15: Test after contacts cleaned- not good

latta at snf.stanford.edu latta at snf.stanford.edu
Thu Sep 13 16:55:15 PDT 2007


WET900  00:39:00  50 wafer spread
Average all wafers = 790A (thinner than last test)
Within-a-wafer = 10.3%  (worse than last test)
Wafer-to-wafer = 3.9%  (a little better)
Drat!




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