Shutdown tylan1 SNF 2007-09-19 14:15:21: Test after full tube and quartzware change

latta at snf.stanford.edu latta at snf.stanford.edu
Wed Sep 19 14:15:21 PDT 2007


WET900  00:39:00  50 wafer spread
Average all wafers = 815A (slight improvement from last test)
Within-a-wafer = 11.7% (worse)
Wafer-to-wafer = 4.8% (also worse)
Pity, because it is one fine looking furnace- all new....




More information about the tylan1-pcs mailing list