From latta at snf.stanford.edu  Fri Dec 12 11:26:21 2008
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Fri, 12 Dec 2008 11:26:21 -0800
Subject: Problem tylan1 SNF 2008-11-18 06:10:49: nonuniformity observed
Message-ID: <mailman.655.1357938809.25926.tylan1-pcs@snf.stanford.edu>

may have been a door issue.  Seems to be ok now.  See qual report in comments.



From latta at snf.stanford.edu  Fri Dec 12 11:26:30 2008
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Fri, 12 Dec 2008 11:26:30 -0800
Subject: Comment tylan1 SNF 2008-11-18 08:02:08: ox thickness is uniform for my cases
Message-ID: <mailman.656.1357938809.25926.tylan1-pcs@snf.stanford.edu>

noted



From latta at snf.stanford.edu  Fri Dec 12 14:32:20 2008
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Fri, 12 Dec 2008 14:32:20 -0800
Subject: Comment tylan1 SNF 2008-12-12 14:32:20: Dec quals
Message-ID: <mailman.657.1357938809.25926.tylan1-pcs@snf.stanford.edu>

WET900  00:39:00  50 wafer spread
Average all wafers = 855A  (expect about 920A)
Within-a-wafer = 0.84%  (expect less than 5%)
Wafer-to-wafer = 0.70% (expect less than 5%)



From latta at snf.stanford.edu  Fri Dec 12 14:32:35 2008
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Fri, 12 Dec 2008 14:32:35 -0800
Subject: Comment tylan1 SNF 2008-11-04 14:23:54: Nov Quals
Message-ID: <mailman.658.1357938809.25926.tylan1-pcs@snf.stanford.edu>

archived



From rshyam at snf.stanford.edu  Mon Dec 15 14:06:37 2008
From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu)
Date: Mon, 15 Dec 2008 14:06:37 -0800
Subject: Problem tylan1 SNF 2008-12-15 14:06:36: O2 high leak MFS alarm
Message-ID: <mailman.659.1357938809.25926.tylan1-pcs@snf.stanford.edu>

Has been showing it all night



From maurice at snf.stanford.edu  Mon Dec 15 14:15:14 2008
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Mon, 15 Dec 2008 14:15:14 -0800
Subject: Shutdown tylan1 SNF 2008-12-15 14:15:13: User reports O2 Hi leak 
Message-ID: <mailman.660.1357938809.25926.tylan1-pcs@snf.stanford.edu>




From seymour at snf.stanford.edu  Mon Dec 15 15:07:36 2008
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Mon, 15 Dec 2008 15:07:36 -0800
Subject: Shutdown tylan1 SNF 2008-12-15 14:15:13: User reports O2 Hi leak 
Message-ID: <mailman.661.1357938809.25926.tylan1-pcs@snf.stanford.edu>

adjusted zero pot for O2HI



From maurice at snf.stanford.edu  Mon Dec 15 15:25:08 2008
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Mon, 15 Dec 2008 15:25:08 -0800
Subject: Problem tylan1 SNF 2008-12-15 14:06:36: O2 high leak MFS alarm
Message-ID: <mailman.662.1357938809.25926.tylan1-pcs@snf.stanford.edu>

Ray adjusted zero pot for O2HI