From rostam at snf.stanford.edu Wed Feb 6 19:44:01 2008 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Wed, 6 Feb 2008 19:44:01 -0800 Subject: Problem tylan1 SNF 2008-02-06 19:44:00: tube doesn't come out Message-ID: it happened again when the damn tube made sure i have spent 45 min diff clean my wafers. From mdickey at snf.stanford.edu Thu Feb 7 06:49:11 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 7 Feb 2008 06:49:11 -0800 Subject: Shutdown tylan1 SNF 2008-02-07 06:49:11: Boat loader Message-ID: Looking into boat loader problem. Loader will go in but not out From seymour at snf.stanford.edu Thu Feb 7 10:36:22 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 7 Feb 2008 10:36:22 -0800 Subject: Problem tylan1 SNF 2008-02-06 19:44:00: tube doesn't come out Message-ID: tube loader now operates normal From seymour at snf.stanford.edu Thu Feb 7 10:39:03 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 7 Feb 2008 10:39:03 -0800 Subject: Shutdown tylan1 SNF 2008-02-07 06:49:11: Boat loader Message-ID: found faulty connection on motor board. check the connections. started dry700 and loader opened as it should. pushed alarm silance and door closed. After run the door opened and them closed when i pushed alarm silance. Tube loader is operating as it should. From latta at snf.stanford.edu Wed Feb 13 15:57:26 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 13 Feb 2008 15:57:26 -0800 Subject: Comment tylan1 SNF 2008-02-13 15:57:26: Feb process quals Message-ID: WET900 00:39:00 50 wafer spread Average all wafers = 874A (expect about 920A) Within-a-wafer = 1.0% (expect less than 5%) Wafer-to-wafer = 0.9% (expect less than 5%) From latta at snf.stanford.edu Wed Feb 13 15:57:43 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 13 Feb 2008 15:57:43 -0800 Subject: Comment tylan1 SNF 2008-01-03 17:39:21: Jan process quals Message-ID: new quals posted From ywidjaja at snf.stanford.edu Thu Feb 14 00:58:26 2008 From: ywidjaja at snf.stanford.edu (ywidjaja at snf.stanford.edu) Date: Thu, 14 Feb 2008 00:58:26 -0800 Subject: Problem tylan1 SNF 2008-02-14 00:58:26: Unresponsive for ~1 hr Message-ID: Front panel did not respond. Tycom display status shows IO error. After about 1 hr, it went online again, continuing where it left off. From rissman at snf.stanford.edu Tue Feb 19 09:18:59 2008 From: rissman at snf.stanford.edu (rissman at snf.stanford.edu) Date: Tue, 19 Feb 2008 09:18:59 -0800 Subject: Problem tylan1 SNF 2008-02-14 00:58:26: Unresponsive for ~1 hr Message-ID: Ray Seymour reset the system and could not replicate the problem. From lwchang at snf.stanford.edu Tue Feb 19 12:36:00 2008 From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu) Date: Tue, 19 Feb 2008 12:36:00 -0800 Subject: Problem tylan1 SNF 2008-02-19 12:35:59: MFS IO ERR Message-ID: Tube was in aready mode after loading the recipe. When pulling the tube out there was an IO err on the screen. From latta at snf.stanford.edu Tue Feb 19 16:27:42 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 19 Feb 2008 16:27:42 -0800 Subject: Problem tylan1 SNF 2008-02-19 16:27:41: Possible flakey controller Message-ID: System seems to be ok now, but use with caution. Intermittent problem- please monitor your run if you chose to use the furnace. From latta at snf.stanford.edu Tue Feb 19 16:27:57 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 19 Feb 2008 16:27:57 -0800 Subject: Problem tylan1 SNF 2008-02-19 12:35:59: MFS IO ERR Message-ID: looking into. From tberg at snf.stanford.edu Wed Feb 20 10:07:50 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 20 Feb 2008 10:07:50 -0800 Subject: Comment tylan1 SNF 2008-02-20 10:07:49: Replaced Slave CPU Message-ID: Replaced Slave CPU will continue to monitor From king at snf.stanford.edu Mon Feb 25 11:17:40 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Mon, 25 Feb 2008 11:17:40 -0800 Subject: Comment tylan1 SNF 2008-02-25 11:17:40: Qualification of tube Message-ID: Last message was unclear. Are you running qualification tests? From seymour at snf.stanford.edu Mon Feb 25 11:27:50 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 25 Feb 2008 11:27:50 -0800 Subject: Comment tylan1 SNF 2008-02-25 11:17:40: Qualification of tube Message-ID: No the comment states the faulty part was replaced but time was needed to assure no further problems and user were to use wiuth caution. The tube has been used over the weekend and no further problems reported. From latta at snf.stanford.edu Tue Feb 26 11:37:28 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 26 Feb 2008 11:37:28 -0800 Subject: Problem tylan1 SNF 2008-02-19 16:27:41: Possible flakey controller Message-ID: Slave CPU replace as per tystar. Under obvservation. From latta at snf.stanford.edu Tue Feb 26 11:38:06 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 26 Feb 2008 11:38:06 -0800 Subject: Comment tylan1 SNF 2008-02-20 10:07:49: Replaced Slave CPU Message-ID: Looks good. Will keep under observation....