From latta at snf.stanford.edu Thu Jan 3 17:38:29 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 3 Jan 2008 17:38:29 -0800 Subject: Comment tylan1 SNF 2007-12-11 09:14:07: mfs alarm Message-ID: From latta at snf.stanford.edu Thu Jan 3 17:39:22 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 3 Jan 2008 17:39:22 -0800 Subject: Comment tylan1 SNF 2008-01-03 17:39:21: Jan process quals Message-ID: WET900 00:39:00 50 wafer spread Average all wafers = 881A (expect about 920A) Within-a-wafer = 1.4% (expect less than 5%) Wafer-to-wafer = 1.1% (expect less than 5%) From latta at snf.stanford.edu Thu Jan 3 17:39:36 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 3 Jan 2008 17:39:36 -0800 Subject: Comment tylan1 SNF 2007-12-04 17:09:23: Dec Process Quals Message-ID: to archives From latta at snf.stanford.edu Fri Jan 4 10:47:48 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 4 Jan 2008 10:47:48 -0800 Subject: Problem tylan1 SNF 2008-01-04 10:47:48: status button on front panel not responding Message-ID: It does not cycle through the status of the tool. From tberg at snf.stanford.edu Mon Jan 7 06:42:58 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 7 Jan 2008 06:42:58 -0800 Subject: Problem tylan1 SNF 2008-01-04 10:47:48: status button on front panel not responding Message-ID: Cycled through fine. Might have been in reading mode From vincentcyw at snf.stanford.edu Fri Jan 11 11:40:33 2008 From: vincentcyw at snf.stanford.edu (vincentcyw at snf.stanford.edu) Date: Fri, 11 Jan 2008 11:40:33 -0800 Subject: Comment tylan1 SNF 2008-01-11 11:40:32: Quartz wand is broken Message-ID: The quartz wand has cracks in it that it is too loose to hold a wafer. From mdickey at snf.stanford.edu Fri Jan 11 11:55:39 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 11 Jan 2008 11:55:39 -0800 Subject: Comment tylan1 SNF 2008-01-11 11:40:32: Quartz wand is broken Message-ID: Wand tip replaced From latta at snf.stanford.edu Tue Jan 29 16:10:24 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 29 Jan 2008 16:10:24 -0800 Subject: Problem tylan1 SNF 2008-01-29 16:10:23: mfc alarm- N2 Message-ID: From seymour at snf.stanford.edu Wed Jan 30 08:40:38 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 30 Jan 2008 08:40:38 -0800 Subject: Comment tylan1 SNF 2008-01-30 08:40:37: testing Nitrogen flow. Message-ID: From seymour at snf.stanford.edu Wed Jan 30 08:41:34 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 30 Jan 2008 08:41:34 -0800 Subject: Comment tylan1 SNF 2008-01-30 08:41:34: testing Nitrogen flow Message-ID: From seymour at snf.stanford.edu Wed Jan 30 08:42:23 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 30 Jan 2008 08:42:23 -0800 Subject: Comment tylan1 SNF 2008-01-30 08:40:37: testing Nitrogen flow. Message-ID: duplicated message From seymour at snf.stanford.edu Wed Jan 30 09:09:41 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 30 Jan 2008 09:09:41 -0800 Subject: Problem tylan1 SNF 2008-01-29 16:10:23: mfc alarm- N2 Message-ID: Checked monoblock mfc zero and found Argon valve to port on and Nitrogen off. Selected Nitrogen. Set N2 flow to 7.85 liters and controller flowed the setpoint. Switched input to Argon and flow was 5.5 liters the condition the problem report was issued for. Input to N2 port is now on N2. From seymour at snf.stanford.edu Wed Jan 30 09:10:57 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 30 Jan 2008 09:10:57 -0800 Subject: Comment tylan1 SNF 2008-01-30 08:41:34: testing Nitrogen flow Message-ID: found and corrected N2 flow error, see problem report for details.