From tberg at snf.stanford.edu Thu Jul 3 06:11:52 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 3 Jul 2008 06:11:52 -0700 Subject: Problem tylan1 SNF 2008-06-18 23:04:57: Down to standby Message-ID: have observed for over a week no problem From latta at snf.stanford.edu Thu Jul 10 13:26:26 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 10 Jul 2008 13:26:26 -0700 Subject: Comment tylan1 SNF 2008-07-10 13:26:25: July Process Quals Message-ID: WET900 00:39:00 50 wafer spread Average all wafers = 843A (expect about 920A) Within-a-wafer = 1.1% (expect less than 5%) Wafer-to-wafer = 1.7% (expect less than 5%) From latta at snf.stanford.edu Thu Jul 10 13:26:39 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 10 Jul 2008 13:26:39 -0700 Subject: Comment tylan1 SNF 2008-06-18 14:42:12: June Process Quals Message-ID: new quals posted. From maurice at snf.stanford.edu Mon Jul 14 16:55:03 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 14 Jul 2008 16:55:03 -0700 Subject: Problem tylan1 SNF 2008-07-14 16:55:02: MFS Nitrogen leak Message-ID: User reports: MFS ALARM nitrogen leak step 35 of wet1000 program N2 setpoint 5 actual 0.8 From mtan at snf.stanford.edu Mon Jul 14 17:32:29 2008 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Mon, 14 Jul 2008 17:32:29 -0700 Subject: Problem tylan1 SNF 2008-07-14 17:32:29: MFS alarm Message-ID: MFS alarm occured several times during the process From lwchang at snf.stanford.edu Wed Jul 16 19:22:49 2008 From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu) Date: Wed, 16 Jul 2008 19:22:49 -0700 Subject: Problem tylan1 SNF 2008-07-16 19:22:48: MFS alarm throuout the process Message-ID: Something wrong with the Ar/N2 FC? From ahazeghi at snf.stanford.edu Wed Jul 16 19:59:50 2008 From: ahazeghi at snf.stanford.edu (ahazeghi at snf.stanford.edu) Date: Wed, 16 Jul 2008 19:59:50 -0700 Subject: Shutdown tylan1 SNF 2008-07-16 19:59:49: Ar line MFS alarm Message-ID: From seymour at snf.stanford.edu Thu Jul 17 07:42:28 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 17 Jul 2008 07:42:28 -0700 Subject: Shutdown tylan1 SNF 2008-07-16 19:59:49: Ar line MFS alarm Message-ID: adjusted alol MFC zeros and did auto zero routine. N2 flowing at setpoint and no alarms. From seymour at snf.stanford.edu Thu Jul 17 07:42:49 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 17 Jul 2008 07:42:49 -0700 Subject: Problem tylan1 SNF 2008-07-14 16:55:02: MFS Nitrogen leak Message-ID: zeroed N2 MFC From seymour at snf.stanford.edu Thu Jul 17 07:43:05 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 17 Jul 2008 07:43:05 -0700 Subject: Problem tylan1 SNF 2008-07-14 17:32:29: MFS alarm Message-ID: N2 MFC ZEROED From seymour at snf.stanford.edu Thu Jul 17 07:43:33 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 17 Jul 2008 07:43:33 -0700 Subject: Problem tylan1 SNF 2008-07-16 19:22:48: MFS alarm throuout the process Message-ID: MFC for N2 zeroed From jjeong1 at snf.stanford.edu Sat Jul 19 00:17:27 2008 From: jjeong1 at snf.stanford.edu (jjeong1 at snf.stanford.edu) Date: Sat, 19 Jul 2008 00:17:27 -0700 Subject: Problem tylan1 SNF 2008-07-19 00:17:27: tylan1 keeps alarming Message-ID: tylan1 keeps alarming even after the ack button is pressed. It's shutdowned. From jjeong1 at snf.stanford.edu Sat Jul 19 00:18:59 2008 From: jjeong1 at snf.stanford.edu (jjeong1 at snf.stanford.edu) Date: Sat, 19 Jul 2008 00:18:59 -0700 Subject: Shutdown tylan1 SNF 2008-07-19 00:18:58: tylan1 shutdown Message-ID: tylan1 keeps alarming. From gunjim at snf.stanford.edu Sat Jul 19 10:34:45 2008 From: gunjim at snf.stanford.edu (gunjim at snf.stanford.edu) Date: Sat, 19 Jul 2008 10:34:45 -0700 Subject: Problem tylan1 SNF 2008-07-19 10:34:44: MFS alarm Message-ID: Still on this morning. Checked the back side of furnace and had "N2 leak" message on display. From seymour at snf.stanford.edu Mon Jul 21 09:56:33 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 21 Jul 2008 09:56:33 -0700 Subject: Shutdown tylan1 SNF 2008-07-19 00:18:58: tylan1 shutdown Message-ID: removing shutdown. I turned off the MFS460 for a short period of time to allow it to reboot correctly. I then checked and adjusted the MFC for N2 to be slightly negative at no flow. Forced the controller to perform its auto zero routine to know that the reading on the MFC was zero flow. The N2 flow is okay with no error messages From seymour at snf.stanford.edu Mon Jul 21 09:58:46 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 21 Jul 2008 09:58:46 -0700 Subject: Problem tylan1 SNF 2008-07-19 00:17:27: tylan1 keeps alarming Message-ID: alarms continue when the MFC output is not at zero millivolts when valve turnedf off. To correct this requires adjusting trim pot on motherboard. From seymour at snf.stanford.edu Mon Jul 21 09:59:39 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 21 Jul 2008 09:59:39 -0700 Subject: Problem tylan1 SNF 2008-07-19 10:34:44: MFS alarm Message-ID: There are no error messages on the N2 or any other gas at this time. From seymour at snf.stanford.edu Mon Jul 21 10:01:01 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 21 Jul 2008 10:01:01 -0700 Subject: Comment tylan1 SNF 2008-07-21 10:01:00: N2 MFC zeroed and flow checked Message-ID: The zero had drifted and indicated a flow when there was none From latta at snf.stanford.edu Wed Jul 30 16:29:00 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 30 Jul 2008 16:29:00 -0700 Subject: Problem tylan1 SNF 2008-07-30 16:28:59: silenced N2 leak alarm... Message-ID: From gunjim at snf.stanford.edu Thu Jul 31 01:20:55 2008 From: gunjim at snf.stanford.edu (gunjim at snf.stanford.edu) Date: Thu, 31 Jul 2008 01:20:55 -0700 Subject: Shutdown tylan1 SNF 2008-07-31 01:20:54: N2 leak alarm Message-ID: MFS error message displayed From seymour at snf.stanford.edu Thu Jul 31 11:22:41 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 31 Jul 2008 11:22:41 -0700 Subject: Shutdown tylan1 SNF 2008-07-31 01:20:54: N2 leak alarm Message-ID: Mike reset the alarm this morniing. I checked system later on this morning and MFC flowed to setpoint and when turned off readout stayed at zero as it should. I reset the slave computer and reloaded a recipe. everything checks good at this time.