Comment tylan1 SNF 2008-06-18 14:42:12: June Process Quals
latta at snf.stanford.edu
latta at snf.stanford.edu
Wed Jun 18 14:42:12 PDT 2008
WET900 00:39:00 50 wafer spread
Average all wafers = 853A (expect about 920A)
Within-a-wafer = 1.5% (expect less than 5%)
Wafer-to-wafer = 1.0% (expect less than 5%)
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