From latta at snf.stanford.edu Thu Oct 2 16:32:42 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 2 Oct 2008 16:32:42 -0700 Subject: Comment tylan1 SNF 2008-10-02 16:32:41: Oct Quals Message-ID: WET900 00:39:00 50 wafer spread Average all wafers = 878A (expect about 920A) Within-a-wafer = 0.8% (expect less than 5%) Wafer-to-wafer = 0.6% (expect less than 5%) From latta at snf.stanford.edu Thu Oct 2 16:33:03 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 2 Oct 2008 16:33:03 -0700 Subject: Comment tylan1 SNF 2008-09-03 17:08:53: Sept quals Message-ID: to the archives... From seymour at snf.stanford.edu Fri Oct 10 08:17:51 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 10 Oct 2008 08:17:51 -0700 Subject: Shutdown tylan1 SNF 2008-10-10 08:17:50: no auto signal Message-ID: From seymour at snf.stanford.edu Fri Oct 10 09:07:54 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 10 Oct 2008 09:07:54 -0700 Subject: Shutdown tylan1 SNF 2008-10-10 08:17:50: no auto signal Message-ID: No auto was an intermitten problem. I checked MFS connections and adjusted zeros and did an auto zero routine on the MFS460. Slave computer connections were checked by Ted. I checked the slave power supply voltages and connections, found one connector that didn't feel right. reconnected the connector and loated WET800 and ran recipe to the end and there were no more problems From gunjim at snf.stanford.edu Sat Oct 11 16:11:40 2008 From: gunjim at snf.stanford.edu (gunjim at snf.stanford.edu) Date: Sat, 11 Oct 2008 16:11:40 -0700 Subject: Problem tylan1 SNF 2008-10-11 16:11:39: "No Auto" error Message-ID: The recope was stopped during the process. Tycom and display do not reflect the tube status. From gunjim at snf.stanford.edu Sat Oct 11 16:17:13 2008 From: gunjim at snf.stanford.edu (gunjim at snf.stanford.edu) Date: Sat, 11 Oct 2008 16:17:13 -0700 Subject: Shutdown tylan1 SNF 2008-10-11 16:17:13: "No auto" error Message-ID: Please see the problem report From seymour at snf.stanford.edu Mon Oct 13 09:12:15 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 13 Oct 2008 09:12:15 -0700 Subject: Comment tylan1 SNF 2008-10-13 09:12:15: replacing slave computer power supply Message-ID: From seymour at snf.stanford.edu Mon Oct 13 10:48:58 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 13 Oct 2008 10:48:58 -0700 Subject: Comment tylan1 SNF 2008-10-13 10:48:58: no auto Message-ID: I replaced slave power supply. I reseated both slave boards and checked connections on back of slave. removed connector for auto input to mfs460, still no auto on mfs460. From seymour at snf.stanford.edu Wed Oct 15 11:04:35 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 15 Oct 2008 11:04:35 -0700 Subject: Shutdown tylan1 SNF 2008-10-11 16:17:13: "No auto" error Message-ID: replaced power supply with the one removed. I ran wet800 three times with no errors or problems From seymour at snf.stanford.edu Wed Oct 15 11:04:50 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 15 Oct 2008 11:04:50 -0700 Subject: Comment tylan1 SNF 2008-10-13 09:12:15: replacing slave computer power supply Message-ID: noted From seymour at snf.stanford.edu Wed Oct 15 11:05:15 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 15 Oct 2008 11:05:15 -0700 Subject: Comment tylan1 SNF 2008-10-13 10:48:58: no auto Message-ID: noted From seymour at snf.stanford.edu Wed Oct 15 11:06:32 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 15 Oct 2008 11:06:32 -0700 Subject: Problem tylan1 SNF 2008-10-11 16:11:39: "No Auto" error Message-ID: found connector that may have caused problem. reseated connector. From seymour at snf.stanford.edu Wed Oct 15 11:08:42 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 15 Oct 2008 11:08:42 -0700 Subject: Problem tylan1 SNF 2008-10-15 11:08:41: ran wet800 three times no problems Message-ID: The tube has experienced No Auto problems since last week. I have worked on the tube and all appears ok at this time. Will keep under observation. From tberg at snf.stanford.edu Wed Oct 22 06:14:47 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 22 Oct 2008 06:14:47 -0700 Subject: Problem tylan1 SNF 2008-10-15 11:08:41: ran wet800 three times no problems Message-ID: numerous runs no problem From haiwei at snf.stanford.edu Sun Oct 26 23:38:36 2008 From: haiwei at snf.stanford.edu (haiwei at snf.stanford.edu) Date: Sun, 26 Oct 2008 23:38:36 -0700 Subject: Problem tylan1 SNF 2008-10-26 23:38:36: bad uniformity for ox Message-ID: I wa targeting 40nm gate ox and ended up with ox from 32nm~130nm. Unacceptable variation for me. From seymour at snf.stanford.edu Tue Oct 28 11:33:07 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 28 Oct 2008 11:33:07 -0700 Subject: Comment tylan1 SNF 2008-10-28 11:33:07: replaced torch and ran TRANSLC clean Message-ID: needs test From latta at snf.stanford.edu Tue Oct 28 15:10:55 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 28 Oct 2008 15:10:55 -0700 Subject: Problem tylan1 SNF 2008-10-28 15:10:54: vacuum wand tip needs replacing Message-ID: From seymour at snf.stanford.edu Tue Oct 28 15:23:01 2008 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 28 Oct 2008 15:23:01 -0700 Subject: Problem tylan1 SNF 2008-10-28 15:10:54: vacuum wand tip needs replacing Message-ID: replaced wand tip From gyama at snf.stanford.edu Thu Oct 30 09:16:17 2008 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Thu, 30 Oct 2008 09:16:17 -0700 Subject: Comment tylan1 SNF 2008-10-30 09:16:14: spring broken on door to back area Message-ID: From tberg at snf.stanford.edu Thu Oct 30 10:32:54 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 30 Oct 2008 10:32:54 -0700 Subject: Comment tylan1 SNF 2008-10-30 09:16:14: spring broken on door to back area Message-ID: Replaced pins on spring closure works fine for now From ludwig at snf.stanford.edu Fri Oct 31 17:00:06 2008 From: ludwig at snf.stanford.edu (ludwig at snf.stanford.edu) Date: Fri, 31 Oct 2008 17:00:06 -0700 Subject: Problem tylan1 SNF 2008-10-31 17:00:06: low oxide Message-ID: I was targeting 2000A of Oxide on Si and all I got was 1660A, processed at 1050C, wet From latta at snf.stanford.edu Fri Oct 31 17:17:25 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 31 Oct 2008 17:17:25 -0700 Subject: Comment tylan1 SNF 2008-10-31 17:17:24: Quals to be run 4 Nov Message-ID: