Problem tylan1 SNF 2008-10-26 23:38:36: bad uniformity for ox

haiwei at snf.stanford.edu haiwei at snf.stanford.edu
Sun Oct 26 23:38:36 PDT 2008

Previous message: Problem tylan1 SNF 2008-10-15 11:08:41: ran wet800 three times no problems
Next message: Comment tylan1 SNF 2008-10-28 11:33:07: replaced torch and ran TRANSLC clean
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

I wa targeting 40nm gate ox and ended up with ox from 32nm~130nm. Unacceptable variation for me.

Previous message: Problem tylan1 SNF 2008-10-15 11:08:41: ran wet800 three times no problems
Next message: Comment tylan1 SNF 2008-10-28 11:33:07: replaced torch and ran TRANSLC clean
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the tylan1-pcs mailing list