From gunjim at snf.stanford.edu Fri Apr 3 07:38:08 2009 From: gunjim at snf.stanford.edu (gunjim at snf.stanford.edu) Date: Fri, 3 Apr 2009 07:38:08 -0700 Subject: Comment tylan1 SNF 2009-04-03 07:38:07: April qual? Message-ID: Can somebody post the results for April qual, please? Thanks you. From latta at snf.stanford.edu Fri Apr 3 09:55:48 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 3 Apr 2009 09:55:48 -0700 Subject: Comment tylan1 SNF 2009-04-03 07:38:07: April qual? Message-ID: As soon as I measure them.... From latta at snf.stanford.edu Fri Apr 3 09:58:38 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 3 Apr 2009 09:58:38 -0700 Subject: Comment tylan1 SNF 2009-02-11 15:03:50: Feb Quals Message-ID: archived From latta at snf.stanford.edu Fri Apr 3 09:58:55 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 3 Apr 2009 09:58:55 -0700 Subject: Comment tylan1 SNF 2009-03-18 10:19:38: tlc clean Message-ID: lotta cleans, huh? From gunjim at snf.stanford.edu Fri Apr 3 11:24:02 2009 From: gunjim at snf.stanford.edu (gunjim at snf.stanford.edu) Date: Fri, 3 Apr 2009 11:24:02 -0700 Subject: Comment tylan1 SNF 2009-04-03 11:24:02: Not bad uniformity with Dry oxidation Message-ID: I have done 900C dry oxidation for 7hrs on 3/31 and deviation was not bad. Expected 680A. In wafer : Average>660.48A, STD>5.5859A Wafer to wafer on the second boat : Average>657.43A, STD>2.7889A From latta at snf.stanford.edu Fri Apr 3 17:06:01 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 3 Apr 2009 17:06:01 -0700 Subject: Comment tylan1 SNF 2009-04-03 17:06:01: April quals Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 825A, Std Dev = 7.8 Front Center = 828A, Std Dev = 3.2 Back Center = 833A, Std Dev = 3.7 Back = 842A, Std Dev = 1.7 Average All = 832A From latta at snf.stanford.edu Fri Apr 3 17:06:18 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 3 Apr 2009 17:06:18 -0700 Subject: Comment tylan1 SNF 2009-03-18 14:06:14: March Quals, Ran 3/9/09 Message-ID: archived From gunjim at snf.stanford.edu Sun Apr 5 17:21:03 2009 From: gunjim at snf.stanford.edu (gunjim at snf.stanford.edu) Date: Sun, 5 Apr 2009 17:21:03 -0700 Subject: Problem tylan1 SNF 2009-04-05 17:21:03: MFS alarm Message-ID: Noticed this afternoon. From tberg at snf.stanford.edu Mon Apr 6 06:27:20 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 6 Apr 2009 06:27:20 -0700 Subject: Comment tylan1 SNF 2009-04-06 06:27:19: Reset slave cpu Message-ID: Will observe for a while From tberg at snf.stanford.edu Tue Apr 14 06:13:21 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 14 Apr 2009 06:13:21 -0700 Subject: Comment tylan1 SNF 2009-04-03 11:24:02: Not bad uniformity with Dry oxidation Message-ID: noted From tberg at snf.stanford.edu Tue Apr 14 06:14:05 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 14 Apr 2009 06:14:05 -0700 Subject: Comment tylan1 SNF 2009-04-06 06:27:19: Reset slave cpu Message-ID: system running fine for over a week From tberg at snf.stanford.edu Tue Apr 14 06:15:05 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 14 Apr 2009 06:15:05 -0700 Subject: Comment tylan1 SNF 2009-04-14 06:15:05: performed temp cal Message-ID: did temp cal from 500 to 1100 C From latta at snf.stanford.edu Thu Apr 16 17:34:18 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 16 Apr 2009 17:34:18 -0700 Subject: Problem tylan1 SNF 2009-04-05 17:21:03: MFS alarm Message-ID: archived From latta at snf.stanford.edu Thu Apr 16 17:37:16 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 16 Apr 2009 17:37:16 -0700 Subject: Comment tylan1 SNF 2009-04-16 17:37:15: Qual after temp cal Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 844A, Std Dev = 3.0 Front Center = 848A, Std Dev = 3.9 Back Center = 855A, Std Dev = 2.7 Back = 868A, Std Dev = 3.4 Average All = 854A From bchui at snf.stanford.edu Tue Apr 21 23:06:12 2009 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Tue, 21 Apr 2009 23:06:12 -0700 Subject: Shutdown tylan1 SNF 2009-04-21 23:06:12: loader stuck in the halfway out position Message-ID: Some labmembers had to manually loosen the screw and push the loader back into the furnace module. (I was using Tylan2 but noticed that Tylan1 was stuck.) From tberg at snf.stanford.edu Wed Apr 22 07:35:33 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 22 Apr 2009 07:35:33 -0700 Subject: Shutdown tylan1 SNF 2009-04-21 23:06:12: loader stuck in the halfway out position Message-ID: tightened cable loader seems to function properly From jwpchen at snf.stanford.edu Thu Apr 23 02:07:08 2009 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Thu, 23 Apr 2009 02:07:08 -0700 Subject: Comment tylan1 SNF 2009-04-23 02:07:07: O2LO alarm in idle Message-ID: O2LO hovers around 1.0... MFC needs to be re-zeroed? From seymour at snf.stanford.edu Thu Apr 23 15:13:08 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 23 Apr 2009 15:13:08 -0700 Subject: Comment tylan1 SNF 2009-04-23 15:13:08: replaced loader motor Message-ID: loader drives in and out normally From gunjim at snf.stanford.edu Fri Apr 24 13:02:51 2009 From: gunjim at snf.stanford.edu (gunjim at snf.stanford.edu) Date: Fri, 24 Apr 2009 13:02:51 -0700 Subject: Shutdown tylan1 SNF 2009-04-24 13:02:51: I/O error Message-ID: I/O error on tycom screen and cannot load recipe. Buttons on the panel are deactivated. From seymour at snf.stanford.edu Fri Apr 24 13:23:00 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 24 Apr 2009 13:23:00 -0700 Subject: Shutdown tylan1 SNF 2009-04-24 13:02:51: I/O error Message-ID: reset slave computer and loaded wet800. started recipe and loader pulled. aborted recipe and notified user ok to use. From latta at snf.stanford.edu Wed Apr 29 09:12:59 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 29 Apr 2009 09:12:59 -0700 Subject: Shutdown tylan1 SNF 2009-04-29 09:12:59: Wet Ox thinckness too high Message-ID: Will continue testing..... From latta at snf.stanford.edu Wed Apr 29 17:13:26 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 29 Apr 2009 17:13:26 -0700 Subject: Shutdown tylan1 SNF 2009-04-29 09:12:59: Wet Ox thinckness too high Message-ID: ah-hum, the growth time was 1:30:00 instead of 0:39:00. Don't know how that could have happened... From latta at snf.stanford.edu Wed Apr 29 17:17:53 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 29 Apr 2009 17:17:53 -0700 Subject: Comment tylan1 SNF 2009-04-29 17:17:52: Qual after gas calibration Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 898A, Std Dev = 5.4 Front Center = 901A, Std Dev = 4.4 Back Center = 907A, Std Dev = 3.8 Back = 918A, Std Dev = 3.1 Average All = 906A From latta at snf.stanford.edu Wed Apr 29 17:18:07 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 29 Apr 2009 17:18:07 -0700 Subject: Comment tylan1 SNF 2009-04-16 17:37:15: Qual after temp cal Message-ID: archived From latta at snf.stanford.edu Wed Apr 29 17:23:37 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 29 Apr 2009 17:23:37 -0700 Subject: Comment tylan1 SNF 2009-04-03 17:06:01: April quals Message-ID: archived From latta at snf.stanford.edu Wed Apr 29 17:24:01 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 29 Apr 2009 17:24:01 -0700 Subject: Comment tylan1 SNF 2009-04-14 06:15:05: performed temp cal Message-ID: archived From latta at snf.stanford.edu Wed Apr 29 17:24:28 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 29 Apr 2009 17:24:28 -0700 Subject: Comment tylan1 SNF 2009-04-23 02:07:07: O2LO alarm in idle Message-ID: archived From latta at snf.stanford.edu Wed Apr 29 17:24:38 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 29 Apr 2009 17:24:38 -0700 Subject: Comment tylan1 SNF 2009-04-23 15:13:08: replaced loader motor Message-ID: archived