From cmcg at snf.stanford.edu Mon Aug 3 13:46:09 2009 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Mon, 3 Aug 2009 13:46:09 -0700 Subject: Problem tylan1 SNF 2009-08-03 13:46:09: I/O error Message-ID: can't load recipe or read status: I/O error from tylan From seymour at snf.stanford.edu Mon Aug 3 13:58:41 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 3 Aug 2009 13:58:41 -0700 Subject: Problem tylan1 SNF 2009-08-03 13:46:09: I/O error Message-ID: removed and reseated slave computer boards. loaded wet800and started, recipe started running ok. Aborted recipe, system running ok at this time. From latta at snf.stanford.edu Wed Aug 12 17:37:11 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 12 Aug 2009 17:37:11 -0700 Subject: Comment tylan1 SNF 2009-07-15 13:30:05: N2 flow shows negative flow ?!? Message-ID: archived From latta at snf.stanford.edu Wed Aug 12 17:37:28 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 12 Aug 2009 17:37:28 -0700 Subject: Comment tylan1 SNF 2009-07-15 14:48:55: repaired Nitrogen flow problem Message-ID: archived From latta at snf.stanford.edu Wed Aug 12 17:39:53 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 12 Aug 2009 17:39:53 -0700 Subject: Comment tylan1 SNF 2009-08-12 17:39:52: Aug quals Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 992A, Std Dev = 7.8 Front Center = 991A, Std Dev = 6.4 Back Center = 997A, Std Dev = 6.4 Back = 1008A, Std Dev = 5.5 Average All = 997A From latta at snf.stanford.edu Wed Aug 12 17:40:03 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 12 Aug 2009 17:40:03 -0700 Subject: Comment tylan1 SNF 2009-07-02 16:28:38: July quals Message-ID: archived From jrjain at snf.stanford.edu Wed Aug 12 19:55:28 2009 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Wed, 12 Aug 2009 19:55:28 -0700 Subject: Comment tylan1 SNF 2009-08-12 19:55:28: Tube left open Message-ID: Noticed tube was left open for 30+min. Sent back in. User's wafers still inside. From bchui at snf.stanford.edu Mon Aug 17 21:20:43 2009 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Mon, 17 Aug 2009 21:20:43 -0700 Subject: Shutdown tylan1 SNF 2009-08-17 21:20:42: 20% variation within wafer Message-ID: Ran WET1000 for 100 minutes, expected 5300-5500A, got only 3800A. Not only that: for center wafer, got 3300A at bottom and 4200A at top of wafer, i.e. some 20% intra-wafer variation (same for all 12 wafers; the one nearest the controller had some 200A less oxide than the one nearest the user.) Clearly something is wrong. From seymour at snf.stanford.edu Tue Aug 18 11:21:42 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 18 Aug 2009 11:21:42 -0700 Subject: Problem tylan1 SNF 2009-08-18 11:21:42: needs test after loader adjustment. Message-ID: From latta at snf.stanford.edu Wed Aug 19 17:26:07 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 19 Aug 2009 17:26:07 -0700 Subject: Comment tylan1 SNF 2009-08-19 17:26:07: Re-qual after door adjustment Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 938A, Std Dev = 11.0 Front Center = 956A, Std Dev = 9.8 Back Center = 970A, Std Dev = 9.3 Back = 986A, Std Dev = 7.3 Average All = 963A Not as good as original Aug qual- torch? From latta at snf.stanford.edu Wed Aug 19 17:26:22 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 19 Aug 2009 17:26:22 -0700 Subject: Problem tylan1 SNF 2009-08-18 11:21:42: needs test after loader adjustment. Message-ID: test posted From latta at snf.stanford.edu Wed Aug 19 17:26:38 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 19 Aug 2009 17:26:38 -0700 Subject: Shutdown tylan1 SNF 2009-08-17 21:20:42: 20% variation within wafer Message-ID: Door adjusted From latta at snf.stanford.edu Wed Aug 19 17:26:50 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 19 Aug 2009 17:26:50 -0700 Subject: Comment tylan1 SNF 2009-08-12 19:55:28: Tube left open Message-ID: Thank you From seymour at snf.stanford.edu Wed Aug 26 08:04:28 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 26 Aug 2009 08:04:28 -0700 Subject: Comment tylan1 SNF 2009-08-26 08:04:28: running tlcclean after injector replaced Message-ID: From rostam at snf.stanford.edu Wed Aug 26 20:31:25 2009 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Wed, 26 Aug 2009 20:31:25 -0700 Subject: Problem tylan1 SNF 2009-08-26 20:31:24: TEMPL way off Message-ID: running recipe 1000AN TEMPL = 400 TEMPC = 1000 TEMPS = 1000 must be bad sensor From tberg at snf.stanford.edu Thu Aug 27 06:30:50 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 27 Aug 2009 06:30:50 -0700 Subject: Problem tylan1 SNF 2009-08-26 20:31:24: TEMPL way off Message-ID: Repaired loose connecton on profile TC. temps look fine now From chienyuc at snf.stanford.edu Sat Aug 29 08:18:53 2009 From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu) Date: Sat, 29 Aug 2009 08:18:53 -0700 Subject: Problem tylan1 SNF 2009-08-29 08:18:53: MFS alarm - N2 leak Message-ID: Keep alarming when I get back to pickup my wafers. From seymour at snf.stanford.edu Mon Aug 31 09:37:42 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 31 Aug 2009 09:37:42 -0700 Subject: Problem tylan1 SNF 2009-08-29 08:18:53: MFS alarm - N2 leak Message-ID: N2 MFc not at zero when off. Adjusted it and N2 leak alarm reset..