Shutdown tylan1 SNF 2009-08-17 21:20:42: 20% variation within wafer

bchui at snf.stanford.edu bchui at snf.stanford.edu
Mon Aug 17 21:20:43 PDT 2009


Ran WET1000 for 100 minutes, expected 5300-5500A, got only 3800A. Not only that: for center wafer, got 3300A at bottom and 4200A at top of wafer, i.e. some 20% intra-wafer variation (same for all 12 wafers; the one nearest the controller had some 200A less oxide than the one nearest the user.)  Clearly something is wrong.




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