Comment tylan1 SNF 2009-08-19 17:26:07: Re-qual after door adjustment

latta at snf.stanford.edu latta at snf.stanford.edu
Wed Aug 19 17:26:07 PDT 2009


WET900  00:39:00  50 wafer spread
  (expect about 920A)
Front = 938A, Std Dev = 11.0
Front Center = 956A, Std Dev = 9.8
Back Center = 970A, Std Dev = 9.3
Back = 986A, Std Dev = 7.3
Average All = 963A
Not as good as original Aug qual- torch?




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