From latta at snf.stanford.edu Tue Dec 1 10:53:51 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 1 Dec 2009 10:53:51 -0800 Subject: Problem tylan1 SNF 2009-12-01 10:53:50: I/O error- can't load recipe..... Message-ID: From seymour at snf.stanford.edu Tue Dec 1 11:32:01 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 1 Dec 2009 11:32:01 -0800 Subject: Problem tylan1 SNF 2009-12-01 10:53:50: I/O error- can't load recipe..... Message-ID: pulled and cleaned slave and I/O boards. checked tube status and got all *'s. loaded wet800 and it loaded fine. From seymour at snf.stanford.edu Tue Dec 1 11:33:15 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 1 Dec 2009 11:33:15 -0800 Subject: Problem tylan1 SNF 2009-11-22 21:52:54: MFC Alarm Message-ID: No alarms at this time. An indication of which alarm would help to assure problem identified. From latta at snf.stanford.edu Tue Dec 1 17:32:33 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 1 Dec 2009 17:32:33 -0800 Subject: Comment tylan1 SNF 2009-12-01 17:32:33: Dec quals Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 972A, Std Dev = 10.1 Front Center = 985A, Std Dev = 10.8 Back Center = 998A, Std Dev = 10.0 Back = 1015A, Std Dev = 7.9 Average All = 993A From latta at snf.stanford.edu Tue Dec 1 17:33:26 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 1 Dec 2009 17:33:26 -0800 Subject: Comment tylan1 SNF 2009-11-06 10:07:58: Nov Quals Message-ID: archived From sgchong at snf.stanford.edu Sat Dec 12 00:17:54 2009 From: sgchong at snf.stanford.edu (sgchong at snf.stanford.edu) Date: Sat, 12 Dec 2009 00:17:54 -0800 Subject: Problem tylan1 SNF 2009-12-12 00:17:54: I/O Error Message-ID: I checked the tool going into the ramp up stage, but when I came back around one hour before the end of the process, there was nothing showing on the front panel of the tool. The status shown on tycom was "I/O error - task complete". The process seems to be running okay. From sgchong at snf.stanford.edu Sat Dec 12 05:21:04 2009 From: sgchong at snf.stanford.edu (sgchong at snf.stanford.edu) Date: Sat, 12 Dec 2009 05:21:04 -0800 Subject: Shutdown tylan1 SNF 2009-12-12 05:21:03: I/O ERROR Message-ID: I/O error in the middle of process. Nothing shows up on the panel, and tycom status shows "I/O error". Boat did not pull out automatically. Was still in wet ox step at the time it should have pulled out. Manually pulled out boat and unloaded wafers. From sgchong at snf.stanford.edu Sat Dec 12 07:07:21 2009 From: sgchong at snf.stanford.edu (sgchong at snf.stanford.edu) Date: Sat, 12 Dec 2009 07:07:21 -0800 Subject: Comment tylan1 SNF 2009-12-12 07:07:20: Running ok again? Message-ID: I just checked back on tylan1, and the panel is on, and it's going through a tlcclean. Did the tool fix itself?? From maurice at snf.stanford.edu Sat Dec 12 10:40:47 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sat, 12 Dec 2009 10:40:47 -0800 Subject: Shutdown tylan1 SNF 2009-12-12 05:21:03: I/O ERROR Message-ID: user reports that tube is running again: I just checked back on tylan1, and the panel is on, and it's going through a tlcclean. Did the tool fix itself?? From maurice at snf.stanford.edu Sat Dec 12 10:41:42 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sat, 12 Dec 2009 10:41:42 -0800 Subject: Problem tylan1 SNF 2009-12-12 00:17:54: I/O Error Message-ID: user says tube running ok