Shutdown tylan1 SNF 2009-12-12 05:21:03: I/O ERROR

sgchong at snf.stanford.edu sgchong at snf.stanford.edu
Sat Dec 12 05:21:04 PST 2009


I/O error in the middle of process.  Nothing shows up on the panel, and tycom status shows "I/O error".  Boat did not pull out automatically.  Was still in wet ox step at the time it should have pulled out.  Manually pulled out boat and unloaded wafers.




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