From tberg at snf.stanford.edu Fri Feb 6 06:09:03 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 6 Feb 2009 06:09:03 -0800 Subject: Comment tylan1 SNF 2009-01-06 08:37:41: reset slave computer Message-ID: Adjusted slave power supply and observed for a week numerous runs From tberg at snf.stanford.edu Fri Feb 6 06:09:13 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 6 Feb 2009 06:09:13 -0800 Subject: Problem tylan1 SNF 2009-01-22 10:58:46: I/O error Message-ID: Adjusted slave power supply and observed for a week numerous runs From tberg at snf.stanford.edu Fri Feb 6 06:09:30 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 6 Feb 2009 06:09:30 -0800 Subject: Comment tylan1 SNF 2009-01-22 11:20:29: tube i/o error Message-ID: Adjusted slave power supply and observed for a week numerous runs From tberg at snf.stanford.edu Fri Feb 6 06:09:39 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 6 Feb 2009 06:09:39 -0800 Subject: Comment tylan1 SNF 2009-01-29 11:28:54: under observation for "no auto" error Message-ID: Adjusted slave power supply and observed for a week numerous runs From seymour at snf.stanford.edu Tue Feb 10 09:13:14 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 10 Feb 2009 09:13:14 -0800 Subject: Comment tylan1 SNF 2009-02-10 09:13:14: O2HI leak alarm Message-ID: I checked and adjusted MFS460 MFC zeros From latta at snf.stanford.edu Wed Feb 11 15:03:51 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 11 Feb 2009 15:03:51 -0800 Subject: Comment tylan1 SNF 2009-02-11 15:03:50: Feb Quals Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 818A, Std Dev = 4.1 Front Center = 813A, Std Dev = 2.9 Back Center = 819A, Std Dev = 1.7 Back = 828A, Std Dev = 4.0 Average All = 820A From latta at snf.stanford.edu Wed Feb 11 15:04:03 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 11 Feb 2009 15:04:03 -0800 Subject: Comment tylan1 SNF 2009-01-06 17:39:37: Jan Quals Message-ID: new quals posted From lwchang at snf.stanford.edu Tue Feb 24 17:35:48 2009 From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu) Date: Tue, 24 Feb 2009 17:35:48 -0800 Subject: Problem tylan1 SNF 2009-02-24 17:35:48: O2 flow not correct Message-ID: MFS alarm In the main oxidation step O2 flow was set to 2500 but only 125 was flowing. During ramp dw step O2 was set to zero but display showed 127 From seymour at snf.stanford.edu Wed Feb 25 07:27:26 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 25 Feb 2009 07:27:26 -0800 Subject: Problem tylan1 SNF 2009-02-24 17:35:48: O2 flow not correct Message-ID: checked and adjusted MFS460 MFC zeros and did an auto zero routine From seymour at snf.stanford.edu Wed Feb 25 07:28:19 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 25 Feb 2009 07:28:19 -0800 Subject: Comment tylan1 SNF 2009-02-10 09:13:14: O2HI leak alarm Message-ID: adjusted all zeros From lwchang at snf.stanford.edu Fri Feb 27 16:22:57 2009 From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu) Date: Fri, 27 Feb 2009 16:22:57 -0800 Subject: Problem tylan1 SNF 2009-02-27 16:22:56: tube doesn't come out in the end of the process Message-ID: From ajamo at snf.stanford.edu Fri Feb 27 23:54:43 2009 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Fri, 27 Feb 2009 23:54:43 -0800 Subject: Problem tylan1 SNF 2009-02-27 23:54:43: No Oxide? Message-ID: Not sure what happened. I loaded wet1000 for 10 min for 1000 angstroms of oxide. I checked the status while the furnace was running every 30 min & it stepped through all the steps - seemed very normal. wafers came out with no oxide? I'm re-running in Tylan 2 - wierd From ajamo at snf.stanford.edu Sat Feb 28 00:29:12 2009 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Sat, 28 Feb 2009 00:29:12 -0800 Subject: Shutdown tylan1 SNF 2009-02-28 00:29:12: door not closing Message-ID: after bad oxide run went to push the tube. door moved incredibly slow and got stuck a few inches before shutting. bad run was probably due to door not shutting all the way. conferred with other lab members on what to do. we the loosened nut on top of the door assy and manually pushed the door closed. From ajamo at snf.stanford.edu Sat Feb 28 02:11:50 2009 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Sat, 28 Feb 2009 02:11:50 -0800 Subject: Problem tylan1 SNF 2009-02-28 02:11:49: Door problem Message-ID: Door moves incredibly slow when you push the tube and it doesn't shut all the way!!! From ajamo at snf.stanford.edu Sat Feb 28 02:13:58 2009 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Sat, 28 Feb 2009 02:13:58 -0800 Subject: Problem tylan1 SNF 2009-02-28 02:13:57: Door problem Message-ID: door moves incredibly slow when you push the tube and it doesn't shut all the way !! shut down tube