Problem tylan1 SNF 2009-02-24 17:35:48: O2 flow not correct

lwchang at snf.stanford.edu lwchang at snf.stanford.edu
Tue Feb 24 17:35:48 PST 2009


MFS alarm In the main oxidation step O2 flow was set to 2500 but only 125 was flowing.
During ramp dw step O2 was set to zero but display showed 127




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