Problem tylan1 SNF 2009-02-27 23:54:43: No Oxide?

ajamo at snf.stanford.edu ajamo at snf.stanford.edu
Fri Feb 27 23:54:43 PST 2009


Not sure what happened.  I loaded wet1000 for 10 min for 1000 angstroms of oxide.  I checked the status while the furnace was running every 30 min & it stepped through all the steps - seemed very normal.  wafers came out with no oxide?  I'm re-running in Tylan 2 - wierd




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