From latta at snf.stanford.edu Fri May 8 11:12:26 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 8 May 2009 11:12:26 -0700 Subject: Comment tylan1 SNF 2009-05-08 11:12:25: May quals Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 908A, Std Dev = 6.4 Front Center = 911A, Std Dev = 4.5 Back Center = 917A, Std Dev = 3.9 Back = 925A, Std Dev = 3.5 Average All = 915A From latta at snf.stanford.edu Fri May 8 11:12:54 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 8 May 2009 11:12:54 -0700 Subject: Comment tylan1 SNF 2009-04-29 17:17:52: Qual after gas calibration Message-ID: archived From nharjee at snf.stanford.edu Thu May 14 02:18:20 2009 From: nharjee at snf.stanford.edu (nharjee at snf.stanford.edu) Date: Thu, 14 May 2009 02:18:20 -0700 Subject: Problem tylan1 SNF 2009-05-14 02:18:20: MFS alarm Message-ID: Received MFS alarm during run. WET1100 for 39 min. Target ~5000A. Measured ~4500A. From latta at snf.stanford.edu Thu May 14 15:57:12 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 14 May 2009 15:57:12 -0700 Subject: Problem tylan1 SNF 2009-05-14 02:18:20: MFS alarm Message-ID: ran ok today From seymour at snf.stanford.edu Fri May 15 09:10:26 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 15 May 2009 09:10:26 -0700 Subject: Shutdown tylan1 SNF 2009-05-15 09:10:26: N2 flow error Message-ID: From seymour at snf.stanford.edu Fri May 15 09:55:43 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 15 May 2009 09:55:43 -0700 Subject: Shutdown tylan1 SNF 2009-05-15 09:10:26: N2 flow error Message-ID: replaced N2 flow sensor and checked operation. From latta at snf.stanford.edu Fri May 15 17:11:00 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 15 May 2009 17:11:00 -0700 Subject: Problem tylan1 SNF 2009-05-15 17:10:59: Lo O2 alarm Message-ID: during ramp-up step of WET1000 recipe. Run will probably be ok. From jasmine at snf.stanford.edu Fri May 15 21:21:18 2009 From: jasmine at snf.stanford.edu (jasmine at snf.stanford.edu) Date: Fri, 15 May 2009 21:21:18 -0700 Subject: Problem tylan1 SNF 2009-05-15 21:21:18: no oxide grew on my wafers Message-ID: The alarm was sounding but was told there was no problem. However at the end of my run there was no oxide on my wafers. So possibly the oxygen is low or cut off From tberg at snf.stanford.edu Mon May 18 06:26:23 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 18 May 2009 06:26:23 -0700 Subject: Problem tylan1 SNF 2009-05-15 21:21:18: no oxide grew on my wafers Message-ID: Found O2 manual valve off. turned back on. checked flow From tberg at snf.stanford.edu Thu May 21 06:11:57 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 21 May 2009 06:11:57 -0700 Subject: Problem tylan1 SNF 2009-05-15 17:10:59: Lo O2 alarm Message-ID: no alarms after mfc zero From seymour at snf.stanford.edu Thu May 28 14:37:58 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 28 May 2009 14:37:58 -0700 Subject: Shutdown tylan1 SNF 2009-05-28 14:37:58: O2 flow problem Message-ID: From seymour at snf.stanford.edu Fri May 29 13:51:35 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 29 May 2009 13:51:35 -0700 Subject: Shutdown tylan1 SNF 2009-05-28 14:37:58: O2 flow problem Message-ID: replaced zero pot, op amp and sensor. checked flows of all gases to setpoint. MFS460 back in auto. needs test after repair From seymour at snf.stanford.edu Fri May 29 13:51:50 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 29 May 2009 13:51:50 -0700 Subject: Problem tylan1 SNF 2009-05-29 13:51:49: needs test after repair Message-ID: