From tberg at snf.stanford.edu Mon Nov 2 07:06:10 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 2 Nov 2009 07:06:10 -0800 Subject: Comment tylan1 SNF 2009-11-02 07:06:09: Display is on and furnace is talking to Tycom Message-ID: Will keep in yellow for observation From seymour at snf.stanford.edu Mon Nov 2 10:41:16 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 2 Nov 2009 10:41:16 -0800 Subject: Shutdown tylan1 SNF 2009-11-02 10:41:16: N2 control loop not working Message-ID: Senses N2 flow when it is not flowing. From seymour at snf.stanford.edu Wed Nov 4 11:18:19 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 4 Nov 2009 11:18:19 -0800 Subject: Shutdown tylan1 SNF 2009-11-02 10:41:16: N2 control loop not working Message-ID: changed sensor and control valve. N2 now flowing at setpoint. From seymour at snf.stanford.edu Wed Nov 4 11:18:45 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 4 Nov 2009 11:18:45 -0800 Subject: Problem tylan1 SNF 2009-10-31 21:32:43: screen is dead. unable to communicate with computer Message-ID: display is reading correctly at this time. From seymour at snf.stanford.edu Wed Nov 4 11:21:13 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 4 Nov 2009 11:21:13 -0800 Subject: Comment tylan1 SNF 2009-11-04 11:21:12: MFS460 operating correctly Message-ID: I set and flowed all gasses in the MFS460. All controlled flow to setpoint. Tube is up From latta at snf.stanford.edu Fri Nov 6 10:07:59 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 6 Nov 2009 10:07:59 -0800 Subject: Comment tylan1 SNF 2009-11-06 10:07:58: Nov Quals Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 974A, Std Dev = 9.7 Front Center = 986A, Std Dev = 10.2 Back Center = 999A, Std Dev = 9.1 Back = 1012A, Std Dev = 7.6 Average All = 993A From latta at snf.stanford.edu Fri Nov 6 10:08:25 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 6 Nov 2009 10:08:25 -0800 Subject: Comment tylan1 SNF 2009-10-01 17:29:44: Oct quals Message-ID: archived From latta at snf.stanford.edu Fri Nov 6 10:08:41 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 6 Nov 2009 10:08:41 -0800 Subject: Comment tylan1 SNF 2009-10-22 14:00:23: system running wet1100 Message-ID: archived From latta at snf.stanford.edu Fri Nov 6 10:09:09 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 6 Nov 2009 10:09:09 -0800 Subject: Comment tylan1 SNF 2009-11-02 07:06:09: Display is on and furnace is talking to Tycom Message-ID: Been good for 5 days From latta at snf.stanford.edu Fri Nov 6 10:10:11 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 6 Nov 2009 10:10:11 -0800 Subject: Comment tylan1 SNF 2009-11-04 11:21:12: MFS460 operating correctly Message-ID: Yeah! Qual good. From lindaw at snf.stanford.edu Sun Nov 15 11:59:03 2009 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sun, 15 Nov 2009 11:59:03 -0800 Subject: Problem tylan1 SNF 2009-11-15 11:59:03: noticed I/O error for tube 1 on main display Message-ID: When the main display starts "Host Task In Progress" to scroll through the status of the tubes, tube 1 gets an I/O error and the "Host Task Complete" message appears without scrolling through the rest of the tubes status (stati?). DI ST 1 also results in I/O error measage. From tberg at snf.stanford.edu Mon Nov 16 06:34:32 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 16 Nov 2009 06:34:32 -0800 Subject: Comment tylan1 SNF 2009-11-16 06:34:31: Reset slave CPU and reloaded recipe Message-ID: Reset slave CPU and reloaded recipe. will keep open for obbervation From tberg at snf.stanford.edu Fri Nov 20 06:20:45 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 20 Nov 2009 06:20:45 -0800 Subject: Problem tylan1 SNF 2009-11-15 11:59:03: noticed I/O error for tube 1 on main display Message-ID: Reset slave CPU observed for several days and several normal runs From tberg at snf.stanford.edu Fri Nov 20 06:20:55 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 20 Nov 2009 06:20:55 -0800 Subject: Comment tylan1 SNF 2009-11-16 06:34:31: Reset slave CPU and reloaded recipe Message-ID: Reset slave CPU observed for several days and several normal runs From jasonlin at snf.stanford.edu Sun Nov 22 21:52:55 2009 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Sun, 22 Nov 2009 21:52:55 -0800 Subject: Problem tylan1 SNF 2009-11-22 21:52:54: MFC Alarm Message-ID: Encountered MFC Alarm at Step 35 (Ramp Down) of WET1000 recipe. Pressed Alarm Ack once, and was able to finish recipe.