From latta at snf.stanford.edu Thu Sep 3 12:40:39 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 3 Sep 2009 12:40:39 -0700 Subject: Comment tylan1 SNF 2009-09-03 12:40:39: Sept quals Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 943A, Std Dev = 9.2 Front Center = 956A, Std Dev = 9.8 Back Center = 970A, Std Dev = 8.7 Back = 990A, Std Dev = 7.9 Average All = 965A From latta at snf.stanford.edu Thu Sep 3 12:40:53 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 3 Sep 2009 12:40:53 -0700 Subject: Comment tylan1 SNF 2009-08-12 17:39:52: Aug quals Message-ID: archived From latta at snf.stanford.edu Thu Sep 3 12:41:04 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 3 Sep 2009 12:41:04 -0700 Subject: Comment tylan1 SNF 2009-08-19 17:26:07: Re-qual after door adjustment Message-ID: archived From latta at snf.stanford.edu Thu Sep 3 12:41:17 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 3 Sep 2009 12:41:17 -0700 Subject: Comment tylan1 SNF 2009-08-26 08:04:28: running tlcclean after injector replaced Message-ID: archived From latta at snf.stanford.edu Thu Sep 3 12:43:58 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 3 Sep 2009 12:43:58 -0700 Subject: Comment tylan1 SNF 2009-09-03 12:43:57: Sept quals Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 952A, Std Dev = 5.7 Front Center = 984A, Std Dev = 7.9 Back Center = 1005A, Std Dev = 7.2 Back = 1024A, Std Dev = 6.2 Average All = 991A From latta at snf.stanford.edu Thu Sep 3 12:44:32 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 3 Sep 2009 12:44:32 -0700 Subject: Comment tylan1 SNF 2009-09-03 12:43:57: Sept quals Message-ID: oppps- wrong furnace... From gunjim at snf.stanford.edu Tue Sep 22 09:44:09 2009 From: gunjim at snf.stanford.edu (gunjim at snf.stanford.edu) Date: Tue, 22 Sep 2009 09:44:09 -0700 Subject: Shutdown tylan1 SNF 2009-09-22 09:44:09: MFS alarm Message-ID: With N2 leak warning at the backside of the tube. From tberg at snf.stanford.edu Tue Sep 22 10:53:42 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 22 Sep 2009 10:53:42 -0700 Subject: Shutdown tylan1 SNF 2009-09-22 09:44:09: MFS alarm Message-ID: Reset zero on flowbase and did autozero From seymour at snf.stanford.edu Wed Sep 30 10:28:16 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 30 Sep 2009 10:28:16 -0700 Subject: Comment tylan1 SNF 2009-09-30 10:28:15: tube locked up with H2/O2 alarm Message-ID: I had to reboot the slave computer to reset the system. I checked and adjusted all MFC zeros. I did auto zero routine. I checked O2 and H2 flow and both controlled to setpoint. I will contact user to report problem. From slcheng at snf.stanford.edu Wed Sep 30 23:45:11 2009 From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu) Date: Wed, 30 Sep 2009 23:45:11 -0700 Subject: Problem tylan1 SNF 2009-09-30 23:45:10: thickness variation Message-ID: I am the user who ran the machine during the problem reported above. After the problem, I reloaded the recipe and started the oxidation. The recipe is Wet1000 95 min. Targtet thickness is 500nm. However, i got a large thickness variation (a color diffreence) from one end to another. Please check the system if there is something wrong.