Problem tylan1 SNF 2009-09-30 23:45:10: thickness variation

slcheng at snf.stanford.edu slcheng at snf.stanford.edu
Wed Sep 30 23:45:11 PDT 2009


I am the user who ran the machine during the problem reported above. 
After the problem, I reloaded the recipe and started the oxidation.
The recipe is Wet1000 95 min. Targtet thickness is 500nm. However, i got a large thickness variation (a color diffreence) from one end to another. Please check the system if there is something wrong.




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