From latta at snf.stanford.edu Fri Apr 2 17:15:21 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 2 Apr 2010 17:15:21 -0700 Subject: Comment tylan1 SNF 2010-04-02 17:15:21: April quals Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 957A, Std Dev = 9.7 Front Center = 975A, Std Dev = 9.5 Back Center = 991A, Std Dev = 8.8 Back = 1012A, Std Dev = 7.7 Average All = 984A From latta at snf.stanford.edu Fri Apr 2 17:15:32 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 2 Apr 2010 17:15:32 -0700 Subject: Comment tylan1 SNF 2010-03-03 16:07:23: Mar qual Message-ID: archived From latta at snf.stanford.edu Fri Apr 2 17:15:42 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 2 Apr 2010 17:15:42 -0700 Subject: Comment tylan1 SNF 2010-03-04 13:42:44: March re-qual Message-ID: archived From latta at snf.stanford.edu Fri Apr 2 17:15:50 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 2 Apr 2010 17:15:50 -0700 Subject: Comment tylan1 SNF 2010-03-16 16:55:10: 2nd re-qual Message-ID: archived From damodei at snf.stanford.edu Thu Apr 8 23:54:44 2010 From: damodei at snf.stanford.edu (damodei at snf.stanford.edu) Date: Thu, 8 Apr 2010 23:54:44 -0700 Subject: Problem tylan1 SNF 2010-04-08 23:54:43: MFS error Message-ID: I'm getting an MFS error which persistently appears even after I clear it. The H2 and O2 flows are correct on the tycom, but show up as zero on the furnace itself. Mysterious; not sure what's going on. From seymour at snf.stanford.edu Fri Apr 9 09:53:25 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 9 Apr 2010 09:53:25 -0700 Subject: Problem tylan1 SNF 2010-04-08 23:54:43: MFS error Message-ID: I ran wet800 for 20 mins twice. No alarms. Gas flows were to setpoint and were visible on MFS460 and tycom. These flows were the same as the recipe 1150A, which the user had problems with. From damodei at snf.stanford.edu Tue Apr 13 01:30:40 2010 From: damodei at snf.stanford.edu (damodei at snf.stanford.edu) Date: Tue, 13 Apr 2010 01:30:40 -0700 Subject: Shutdown tylan1 SNF 2010-04-13 01:30:39: Furnace is off the rails Message-ID: The furnace is off its rails, literally. I was running program WET1100, when I returned to unload my wafers, the rails were sagging on the side toward the tube. There is so much sag I believe it would be dangerous to close the tube (it looks as if the clear circular diffuser will crash into the tube if I try to do that). Also, there appear to be broken wafer pieces inside and just outside the tube. All of my wafers came out fine, so there must have already been a wafer in the tube (either broken or whole, left by a previous user) and was pushed out by the sagging tube. As far as I can tell, the rails are supported only on one side, so perhaps that support needs to be tightened. I don't want to waste energy by leaving the tube open, but it's unsafe to close, so I see little choice but to leave it open. Needs urgent attention. Really bizarre. From seymour at snf.stanford.edu Tue Apr 13 07:39:19 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 13 Apr 2010 07:39:19 -0700 Subject: Shutdown tylan1 SNF 2010-04-13 01:30:39: Furnace is off the rails Message-ID: front linear bearing came out of loader causing front of loader to settle down. Placed linear bearing in correct position and tightened retainer. removed wafer chips and ran loader in using auto loader mode. Loader not dragging.