From tberg at snf.stanford.edu  Fri Dec  3 06:10:36 2010
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Fri, 3 Dec 2010 06:10:36 -0800
Subject: Problem tylan1 SNF 2010-12-03 06:10:36: MFS alarms N2
Message-ID: <mailman.934.1357938811.25926.tylan1-pcs@snf.stanford.edu>




From seymour at snf.stanford.edu  Fri Dec  3 07:15:33 2010
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Fri, 3 Dec 2010 07:15:33 -0800
Subject: Shutdown tylan1 SNF 2010-12-03 07:15:32: alarms and no display
Message-ID: <mailman.935.1357938811.25926.tylan1-pcs@snf.stanford.edu>




From seymour at snf.stanford.edu  Fri Dec  3 08:22:30 2010
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Fri, 3 Dec 2010 08:22:30 -0800
Subject: Problem tylan1 SNF 2010-12-03 06:10:36: MFS alarms N2
Message-ID: <mailman.936.1357938811.25926.tylan1-pcs@snf.stanford.edu>




From seymour at snf.stanford.edu  Fri Dec  3 08:24:57 2010
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Fri, 3 Dec 2010 08:24:57 -0800
Subject: Shutdown tylan1 SNF 2010-12-03 07:15:32: alarms and no display
Message-ID: <mailman.937.1357938811.25926.tylan1-pcs@snf.stanford.edu>

N2 is flowing correctly with no alarms. MFS460 has a display problem but controlls fine.



From seymour at snf.stanford.edu  Fri Dec  3 08:25:34 2010
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Fri, 3 Dec 2010 08:25:34 -0800
Subject: Problem tylan1 SNF 2010-12-03 08:25:33: mfs460 display problem
Message-ID: <mailman.938.1357938811.25926.tylan1-pcs@snf.stanford.edu>




From latta at snf.stanford.edu  Tue Dec  7 16:46:15 2010
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Tue, 7 Dec 2010 16:46:15 -0800
Subject: Comment tylan1 SNF 2010-12-07 16:46:14: Dec quals
Message-ID: <mailman.939.1357938811.25926.tylan1-pcs@snf.stanford.edu>

WET900  00:39:00  50 wafer spread
  (expect about 920A)
Front = 1090A, Std Dev = 4.8
Front Center = 1093A, Std Dev = 5.6
Back Center = 1108A, Std Dev = 5.8
Back = 1124A, Std Dev = 4.4
Average All = 1104A



From latta at snf.stanford.edu  Tue Dec  7 16:46:25 2010
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Tue, 7 Dec 2010 16:46:25 -0800
Subject: Comment tylan1 SNF 2010-11-03 15:30:20: Nov Quals
Message-ID: <mailman.940.1357938811.25926.tylan1-pcs@snf.stanford.edu>

archived



From seymour at snf.stanford.edu  Fri Dec 10 11:56:29 2010
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Fri, 10 Dec 2010 11:56:29 -0800
Subject: Shutdown tylan1 SNF 2010-12-10 11:56:28: mfs error 80
Message-ID: <mailman.941.1357938811.25926.tylan1-pcs@snf.stanford.edu>

Not responding to setpoints or turning on valves.