From latta at snf.stanford.edu Fri Jul 2 09:51:25 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 2 Jul 2010 09:51:25 -0700 Subject: Comment tylan1 SNF 2010-07-02 09:51:24: July quals Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 951A, Std Dev = 9.6 Front Center = 977A, Std Dev = 10.6 Back Center = 995A, Std Dev = 10.3 Back = 1016A, Std Dev = 8.9 Average All = 985A From latta at snf.stanford.edu Fri Jul 2 09:52:06 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 2 Jul 2010 09:52:06 -0700 Subject: Comment tylan1 SNF 2010-06-02 16:21:31: June quals Message-ID: archived From latta at snf.stanford.edu Fri Jul 2 09:52:46 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 2 Jul 2010 09:52:46 -0700 Subject: Comment tylan1 SNF 2010-06-03 16:42:20: protective glass shealth on vac. wand Message-ID: moved to problem From latta at snf.stanford.edu Fri Jul 2 09:53:16 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 2 Jul 2010 09:53:16 -0700 Subject: Problem tylan1 SNF 2010-07-02 09:53:16: Vac wand's protective quartz is broken Message-ID: From tberg at snf.stanford.edu Fri Jul 2 10:54:43 2010 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 2 Jul 2010 10:54:43 -0700 Subject: Problem tylan1 SNF 2010-07-02 09:53:16: Vac wand's protective quartz is broken Message-ID: replaced sleeve From hongyuc at snf.stanford.edu Mon Jul 12 17:31:37 2010 From: hongyuc at snf.stanford.edu (hongyuc at snf.stanford.edu) Date: Mon, 12 Jul 2010 17:31:37 -0700 Subject: Problem tylan1 SNF 2010-07-12 17:31:37: boat out system problem Message-ID: the furnance cannot come out after hitting "run" at beginning and when the program ended. Hitting "manual out" didn't work, either. From seymour at snf.stanford.edu Tue Jul 13 08:17:57 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 13 Jul 2010 08:17:57 -0700 Subject: Problem tylan1 SNF 2010-07-12 17:31:37: boat out system problem Message-ID: Cleaned and tightened loader drive pully. Adjusted door flag and loader drive tension. checked out loader in manual and auto and both work normally. From seymour at snf.stanford.edu Wed Jul 14 08:28:58 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 14 Jul 2010 08:28:58 -0700 Subject: Problem tylan1 SNF 2010-07-14 08:28:57: found tube open Message-ID: user logged on but not in area. I closed tube with user wafers inside and left tube enabled From latta at snf.stanford.edu Wed Jul 14 10:22:47 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 14 Jul 2010 10:22:47 -0700 Subject: Problem tylan1 SNF 2010-07-14 08:28:57: found tube open Message-ID: Talked to user. He has seen the error of his ways.... From seymour at snf.stanford.edu Thu Jul 15 07:15:23 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 15 Jul 2010 07:15:23 -0700 Subject: Problem tylan1 SNF 2010-07-15 07:15:23: tube found open no one in fab Message-ID: this is the second time in two days this tube has been left unattended and open at end of run. the reservation on the tube ended at 3:30 am. I closed the tube with wafers on the loader. From narii at snf.stanford.edu Thu Jul 15 12:45:37 2010 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Thu, 15 Jul 2010 12:45:37 -0700 Subject: Problem tylan1 SNF 2010-07-15 12:45:36: MFS alarm, tube was left open Message-ID: Tube was left open. After I close it and tried to run a recipe, MFS alarm:01 occured. From seymour at snf.stanford.edu Thu Jul 15 13:15:48 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 15 Jul 2010 13:15:48 -0700 Subject: Problem tylan1 SNF 2010-07-15 12:45:36: MFS alarm, tube was left open Message-ID: found the MFS460 in manual, which gives the error message 01. Put tube in auto. no idea how tube got in manual. From seymour at snf.stanford.edu Thu Jul 15 13:16:21 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 15 Jul 2010 13:16:21 -0700 Subject: Problem tylan1 SNF 2010-07-15 07:15:23: tube found open no one in fab Message-ID: user returned for wafers and left tube open