Problem tylan1 SNF 2010-07-15 12:45:36: MFS alarm, tube was left open

narii at snf.stanford.edu narii at snf.stanford.edu
Thu Jul 15 12:45:37 PDT 2010

Previous message: Problem tylan1 SNF 2010-07-15 07:15:23: tube found open no one in fab
Next message: Problem tylan1 SNF 2010-07-15 12:45:36: MFS alarm, tube was left open
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Tube was left open. After I close it and tried to run a recipe, MFS alarm:01 occured.

Previous message: Problem tylan1 SNF 2010-07-15 07:15:23: tube found open no one in fab
Next message: Problem tylan1 SNF 2010-07-15 12:45:36: MFS alarm, tube was left open
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the tylan1-pcs mailing list