Problem tylan1 SNF 2010-07-15 07:15:23: tube found open no one in fab
seymour at snf.stanford.edu
seymour at snf.stanford.edu
Thu Jul 15 13:16:21 PDT 2010
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Problem tylan1 SNF 2010-07-15 07:15:23: tube found open no one in fab
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Problem tylan1 SNF 2010-07-15 12:45:36: MFS alarm, tube was left open
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user returned for wafers and left tube open
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Problem tylan1 SNF 2010-07-15 07:15:23: tube found open no one in fab
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Problem tylan1 SNF 2010-07-15 12:45:36: MFS alarm, tube was left open
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