From latta at snf.stanford.edu Tue Mar 2 13:58:17 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 2 Mar 2010 13:58:17 -0800 Subject: Problem tylan1 SNF 2010-03-02 13:58:17: temp interlock error Message-ID: during wet step of WET900 program. H2 not flowing for the first 15-17 mins. Thickness looks thin, although I don't have the measurements done yet. From seymour at snf.stanford.edu Tue Mar 2 15:04:42 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 2 Mar 2010 15:04:42 -0800 Subject: Comment tylan1 SNF 2010-03-02 15:04:41: checked tube operation Message-ID: temp was 800, H2 temp interlock was on. I gave the MFS460 the setpoints for wet900, 2500 O2 and 150 for H2. flowed for ten mins both gases within 1% of setpoint. when I came back from lunch the H2 was flashing and alarm silance turned it off. I guess the H2 temp interlock was off when H2 was toold to turn on and the interlock prevented it. everything looks good on the tube now. I will keep under observation. From latta at snf.stanford.edu Wed Mar 3 16:07:23 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 3 Mar 2010 16:07:23 -0800 Subject: Comment tylan1 SNF 2010-03-03 16:07:23: Mar qual Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 710A, Std Dev = 9.9 Front Center = 722A, Std Dev = 11.9 Back Center = 736A, Std Dev = 22.6 Back = 750A, Std Dev = 8.5 Average All = 730A From latta at snf.stanford.edu Wed Mar 3 16:07:34 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 3 Mar 2010 16:07:34 -0800 Subject: Comment tylan1 SNF 2010-02-16 15:30:25: Feb quals Message-ID: archived From latta at snf.stanford.edu Wed Mar 3 16:13:49 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 3 Mar 2010 16:13:49 -0800 Subject: Problem tylan1 SNF 2010-03-03 16:13:48: Quals bad Message-ID: March qual is bad- the thickness is way too thin. We will retest 4 Mar and post results. From latta at snf.stanford.edu Thu Mar 4 13:42:45 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 4 Mar 2010 13:42:45 -0800 Subject: Comment tylan1 SNF 2010-03-04 13:42:44: March re-qual Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 967A, Std Dev = 21.6 Front Center = 974A, Std Dev = 10.5 Back Center = 992A, Std Dev = 10.3 Back = 1016A, Std Dev = 8.6 Average All = 987A From latta at snf.stanford.edu Thu Mar 4 13:43:35 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 4 Mar 2010 13:43:35 -0800 Subject: Problem tylan1 SNF 2010-03-03 16:13:48: Quals bad Message-ID: Re-qual within spec- much better. Std dev a bit high, but ok From latta at snf.stanford.edu Thu Mar 4 13:43:58 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 4 Mar 2010 13:43:58 -0800 Subject: Problem tylan1 SNF 2010-03-02 13:58:17: temp interlock error Message-ID: ok now From latta at snf.stanford.edu Thu Mar 4 13:44:33 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 4 Mar 2010 13:44:33 -0800 Subject: Comment tylan1 SNF 2010-03-02 15:04:41: checked tube operation Message-ID: archived From barlian at snf.stanford.edu Sat Mar 6 22:56:16 2010 From: barlian at snf.stanford.edu (barlian at snf.stanford.edu) Date: Sat, 6 Mar 2010 22:56:16 -0800 Subject: Problem tylan1 SNF 2010-03-06 22:56:15: didn't give the desired thickness Message-ID: I ran 1100C for 33 minutes (main time), I had 1300A of oxide already on my wafers. After about 3 hour tube time, the resulting oxide thickness was 1800A. I was expecting 5000A based on the Deal-Grove model. From jasonlin at snf.stanford.edu Mon Mar 8 02:00:40 2010 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Mon, 8 Mar 2010 02:00:40 -0800 Subject: Problem tylan1 SNF 2010-03-08 02:00:39: MFS Error Message-ID: MFS Error occured several times during run. Ran WET1000 for 85 minutes, expected 500nm, got about 75nm only. From seymour at snf.stanford.edu Mon Mar 8 11:10:28 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 8 Mar 2010 11:10:28 -0800 Subject: Comment tylan1 SNF 2010-03-08 11:10:27: set O2 and H2 to values in WET900 Message-ID: flowed O2 at 1500 sccm and H2 at 2221 sccm without deviations or alarms. From seymour at snf.stanford.edu Thu Mar 11 08:55:25 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 11 Mar 2010 08:55:25 -0800 Subject: Comment tylan1 SNF 2010-03-11 08:55:25: loaded and ran wet800 with no H2 alarms. Message-ID: H2 flowed to setpoint and shutdown at end of step with no errors. From latta at snf.stanford.edu Tue Mar 16 16:55:11 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 16 Mar 2010 16:55:11 -0700 Subject: Comment tylan1 SNF 2010-03-16 16:55:10: 2nd re-qual Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 943A, Std Dev = 11.4 Front Center = 951A, Std Dev = 11.8 Back Center = 965A, Std Dev = 11.4 Back = 990A, Std Dev = 9.0 Average All = 962A From latta at snf.stanford.edu Tue Mar 16 16:55:36 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 16 Mar 2010 16:55:36 -0700 Subject: Comment tylan1 SNF 2010-03-08 11:10:27: set O2 and H2 to values in WET900 Message-ID: qual good! From latta at snf.stanford.edu Tue Mar 16 16:55:47 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 16 Mar 2010 16:55:47 -0700 Subject: Comment tylan1 SNF 2010-03-11 08:55:25: loaded and ran wet800 with no H2 alarms. Message-ID: qual good From latta at snf.stanford.edu Tue Mar 16 16:56:14 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 16 Mar 2010 16:56:14 -0700 Subject: Problem tylan1 SNF 2010-03-06 22:56:15: didn't give the desired thickness Message-ID: mfc's re-set From latta at snf.stanford.edu Tue Mar 16 16:56:34 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 16 Mar 2010 16:56:34 -0700 Subject: Problem tylan1 SNF 2010-03-08 02:00:39: MFS Error Message-ID: mfc re-set, qual good From sbasumal at snf.stanford.edu Wed Mar 24 02:17:49 2010 From: sbasumal at snf.stanford.edu (sbasumal at snf.stanford.edu) Date: Wed, 24 Mar 2010 02:17:49 -0700 Subject: Comment tylan1 SNF 2010-03-24 02:17:49: tring to strip stubbron resist in hot pot on the left Message-ID: will leave all night From seymour at snf.stanford.edu Wed Mar 24 09:06:25 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 24 Mar 2010 09:06:25 -0700 Subject: Comment tylan1 SNF 2010-03-24 02:17:49: tring to strip stubbron resist in hot pot on the left Message-ID: should not be on tylan1 coral page, this is a wet bench issue