Problem tylan1 SNF 2010-03-06 22:56:15: didn't give the desired thickness

barlian at snf.stanford.edu barlian at snf.stanford.edu
Sat Mar 6 22:56:16 PST 2010


I ran 1100C for 33 minutes (main time), I had 1300A of oxide already  on my wafers. After about 3 hour tube time, the resulting oxide thickness was 1800A. I was expecting 5000A based on the Deal-Grove model.




More information about the tylan1-pcs mailing list