From latta at snf.stanford.edu  Tue May  4 16:02:57 2010
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Tue, 4 May 2010 16:02:57 -0700
Subject: Comment tylan1 SNF 2010-05-04 16:02:57: May quals
Message-ID: <mailman.860.1357938811.25926.tylan1-pcs@snf.stanford.edu>

WET900  00:39:00  50 wafer spread
  (expect about 920A)
Front = 1020A, Std Dev = 11.0
Front Center = 1032A, Std Dev = 9.9
Back Center = 1045A, Std Dev = 9.2
Back = 1058A, Std Dev = 7.4
Average All = 1039A



From latta at snf.stanford.edu  Tue May  4 16:03:07 2010
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Tue, 4 May 2010 16:03:07 -0700
Subject: Comment tylan1 SNF 2010-04-02 17:15:21: April quals
Message-ID: <mailman.861.1357938811.25926.tylan1-pcs@snf.stanford.edu>

archived



From maurice at snf.stanford.edu  Tue May 25 10:54:29 2010
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Tue, 25 May 2010 10:54:29 -0700
Subject: Problem tylan1 SNF 2010-05-25 10:54:28: vacuum wand chipped
Message-ID: <mailman.862.1357938811.25926.tylan1-pcs@snf.stanford.edu>




From seymour at snf.stanford.edu  Tue May 25 11:21:12 2010
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Tue, 25 May 2010 11:21:12 -0700
Subject: Problem tylan1 SNF 2010-05-25 10:54:28: vacuum wand chipped
Message-ID: <mailman.863.1357938811.25926.tylan1-pcs@snf.stanford.edu>

vacuum tip replaced



From maurice at snf.stanford.edu  Tue May 25 11:43:03 2010
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Tue, 25 May 2010 11:43:03 -0700
Subject: Comment tylan1 SNF 2010-05-25 11:43:02: created 900LO
Message-ID: <mailman.864.1357938811.25926.tylan1-pcs@snf.stanford.edu>

Created 900LO
-
Dry oxide at 900c with very low O2
O2LO= 200sccm
N2= 2.3
-
on dry disk
- 
Request by Ludwig and Peter G