Problem tylan1 SNF 2010-11-01 11:57:37: Tylan 1 wet ox test thin

maurice at snf.stanford.edu maurice at snf.stanford.edu
Mon Nov 1 11:57:38 PDT 2010


wet900  00:39:00
50 wafer spred
(t,tc,c,bc,b,l,lc,rc,r)
frontboat wafer 1     792,741,682,595,546,695,682,690,708
frontboat wafer 25   831,819,761,705,661,716,735,788,828
backboat wafer 1     906,875,836,756,690,833,832,845,856
backboatwafer25    962,934,894,846,803,857,871,965,948
-
-door issue?




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