From latta at snf.stanford.edu Fri Oct 1 17:32:56 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 1 Oct 2010 17:32:56 -0700 Subject: Comment tylan1 SNF 2010-10-01 17:32:56: Oct quals Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 1052A, Std Dev = 5.6 Front Center = 1055A, Std Dev = 6.8 Back Center = 1065A, Std Dev = 6.6 Back = 1085A, Std Dev = 5.8 Average All = 1064A From latta at snf.stanford.edu Fri Oct 1 17:33:28 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 1 Oct 2010 17:33:28 -0700 Subject: Comment tylan1 SNF 2010-09-02 15:40:51: Sept quals Message-ID: new very similiar quals posted From latta at snf.stanford.edu Fri Oct 1 17:33:51 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 1 Oct 2010 17:33:51 -0700 Subject: Comment tylan1 SNF 2010-09-03 09:29:23: replaced ps cable Message-ID: archived From bchui at snf.stanford.edu Fri Oct 8 16:35:09 2010 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Fri, 8 Oct 2010 16:35:09 -0700 Subject: Problem tylan1 SNF 2010-10-08 16:35:08: Strange behavior Message-ID: I ran WET1000 for 1h34min, expecting 5000A thermal oxide. Only got 630A. Two days before that, i ran a 1100A thermal anneal on polySi to remove stress, but resulting wafers were very stressed. I checked the O2 and temp readouts on the Zenith monitor during the oxidation and the numbers looked fine. But something is definitely amiss. Use with caution. From seymour at snf.stanford.edu Wed Oct 13 11:07:07 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 13 Oct 2010 11:07:07 -0700 Subject: Problem tylan1 SNF 2010-10-13 11:07:07: aborted tlclean Message-ID: system alarming for O2 H2 interlock.I will check all MFC zeros and restart. From ericp at snf.stanford.edu Thu Oct 14 01:28:42 2010 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Thu, 14 Oct 2010 01:28:42 -0700 Subject: Comment tylan1 SNF 2010-10-14 01:28:41: Ran DRY1100- result as expected Message-ID: As a test, I ran DRY1100 to debug the earlier report of under-oxidation (WET). My guess is (based on Ben's reported thickness) that the H2 didn't participate in the oxidation, because the thickness was consistent with a dry oxidation. I ran this DRY test to see if there is any other problem, and there appears to be no problem with O2, nor with temperature. So, unless it's intermittent, the problem may be with the H2 flow or the torch. -Eric From latta at snf.stanford.edu Thu Oct 14 11:42:26 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 14 Oct 2010 11:42:26 -0700 Subject: Problem tylan1 SNF 2010-10-13 11:07:07: aborted tlclean Message-ID: next clean worked. From latta at snf.stanford.edu Thu Oct 14 11:43:59 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 14 Oct 2010 11:43:59 -0700 Subject: Problem tylan1 SNF 2010-10-08 16:35:08: Strange behavior Message-ID: We've narrowed this down to an intermittent door interlock problem. More info will be posted as a problem in coral. From latta at snf.stanford.edu Thu Oct 14 11:49:11 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 14 Oct 2010 11:49:11 -0700 Subject: Problem tylan1 SNF 2010-10-14 11:49:10: Door interlock problem Message-ID: The thin oxidations are due to an intermittent door interlok problem. We are monitoring this issue. The hardware is working fine (flags and switches are aligned) but sometimes the tycom shows 'Door Intlk off' and this will not allow the O2 to flow. Please check the tycom shortly after the door has cloed during the load and stabilze step to make sure 'door intlk is on'. If it is off and you are running a wet ox you may want to stop the recipe. Dry oxidations are ok. From seymour at snf.stanford.edu Tue Oct 19 11:51:44 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 19 Oct 2010 11:51:44 -0700 Subject: Shutdown tylan1 SNF 2010-10-19 11:51:43: tube has tca interlock Message-ID: I aborted TLCCLEAN due to second alarm for TCA interlock. I will check out system after lunch. From seymour at snf.stanford.edu Tue Oct 19 13:57:42 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 19 Oct 2010 13:57:42 -0700 Subject: Shutdown tylan1 SNF 2010-10-19 11:51:43: tube has tca interlock Message-ID: checked MFS460 zeros. did auto zero routine. Checked door flag position all looked good. Restarting tlcclean. From seymour at snf.stanford.edu Tue Oct 19 14:55:21 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 19 Oct 2010 14:55:21 -0700 Subject: Shutdown tylan1 SNF 2010-10-19 14:55:20: O2HI interlock Message-ID: there seems to be an intermitten door interlock signal that I am trying to trace asnd identify where the problem lies. From seymour at snf.stanford.edu Wed Oct 20 14:12:49 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 20 Oct 2010 14:12:49 -0700 Subject: Shutdown tylan1 SNF 2010-10-19 14:55:20: O2HI interlock Message-ID: replaced MFS460 I/O board. Ran TLCCLEAN with no alarms of faults From seymour at snf.stanford.edu Wed Oct 20 14:13:57 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 20 Oct 2010 14:13:57 -0700 Subject: Problem tylan1 SNF 2010-10-14 11:49:10: Door interlock problem Message-ID: replaced MFS460 I/O board. Ran TLCCLEAN with no faults. From zzp at snf.stanford.edu Mon Oct 25 09:42:44 2010 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Mon, 25 Oct 2010 09:42:44 -0700 Subject: Problem tylan1 SNF 2010-10-25 09:42:43: wet850 15 min. gets ~80A oxide Message-ID: it seemed there was no steam flowing during the 15 min., although the readings were observed normal. From seymour at snf.stanford.edu Mon Oct 25 10:51:22 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 25 Oct 2010 10:51:22 -0700 Subject: Comment tylan1 SNF 2010-10-25 10:51:21: ran O2 and H2 in manual with no problems Message-ID: From seymour at snf.stanford.edu Mon Oct 25 11:58:33 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 25 Oct 2010 11:58:33 -0700 Subject: Comment tylan1 SNF 2010-10-25 11:58:33: ran wet850 for 15 mins Message-ID: no problems found during this test, H2 and O2 flowed to setpoint. All gas lines connected to tube. Needs a thichness test now. From shott at snf.stanford.edu Mon Oct 25 17:14:39 2010 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Mon, 25 Oct 2010 17:14:39 -0700 Subject: Shutdown tylan1 SNF 2010-10-25 17:14:37: Compressed air line broken .... Message-ID: Just before 5 p.m., Mary Tang reported that she heard a loud hissing coming from the L119 service area. She asked me to check it out as she was on her way out. I found that a 1/8" dia compressed air line had severed on the tylan1 jungle. This is the red line that goes from the back of the furnace (turned on/off by the little quarter-turn black handled Whitey valve that goes to the pneumatic manifold closer to the furnace. As this line is likely rather old, we should replace it completely (rather than simply cutting and refitting) and should likely replace all of the other three pneumatic lines as well. Note: once the lines are repaired, the quarter-turn Whitey valve will need to be turned back on. Thanks, John From seymour at snf.stanford.edu Tue Oct 26 09:00:08 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 26 Oct 2010 09:00:08 -0700 Subject: Shutdown tylan1 SNF 2010-10-25 17:14:37: Compressed air line broken .... Message-ID: replaced compressed air line to manifold for nupros From latta at snf.stanford.edu Wed Oct 27 15:26:08 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 27 Oct 2010 15:26:08 -0700 Subject: Problem tylan1 SNF 2010-10-27 15:26:08: Qual test after air hose repair- no wet ox Message-ID: WET900 00:39:00 50 wafer spread Front 151A, SD = 3.0 Center front 145A, SD = 2.7 Center back 147A, SD = 2.5 Back 150A, SD = 2.4 From seymour at snf.stanford.edu Thu Oct 28 08:58:16 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 28 Oct 2010 08:58:16 -0700 Subject: Shutdown tylan1 SNF 2010-10-28 08:58:15: pulling tube Message-ID: From seymour at snf.stanford.edu Fri Oct 29 11:59:03 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 29 Oct 2010 11:59:03 -0700 Subject: Shutdown tylan1 SNF 2010-10-28 08:58:15: pulling tube Message-ID: replaced quartz tube and loader quartz cleaned. loaded tlcclean and turned on breaker. tube heating up and then clean will be ran. From seymour at snf.stanford.edu Fri Oct 29 14:22:02 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 29 Oct 2010 14:22:02 -0700 Subject: Problem tylan1 SNF 2010-10-29 14:22:00: needs test after repair Message-ID: Replaced quartz ware and ran TLCCLEAN.