From latta at snf.stanford.edu Tue Mar 1 15:08:18 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 1 Mar 2011 15:08:18 -0800 Subject: Shutdown tylan1 SNF 2011-03-01 15:08:18: Tried TLCCLEAN, but source TC shows 'b' Message-ID: and now, after recipe aborted, it shows 400.0 From tberg at snf.stanford.edu Wed Mar 2 11:19:29 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 2 Mar 2011 11:19:29 -0800 Subject: Comment tylan1 SNF 2011-03-02 11:19:29: Running TLC clean Message-ID: From maurice at snf.stanford.edu Wed Mar 2 14:12:40 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 2 Mar 2011 14:12:40 -0800 Subject: Shutdown tylan1 SNF 2011-03-01 15:08:18: Tried TLCCLEAN, but source TC shows 'b' Message-ID: TC isuue fixed and TLC run by Ted From tberg at snf.stanford.edu Wed Mar 2 14:23:31 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 2 Mar 2011 14:23:31 -0800 Subject: Comment tylan1 SNF 2011-03-02 14:23:30: tlc completed no problem Message-ID: From maurice at snf.stanford.edu Wed Mar 2 14:25:00 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 2 Mar 2011 14:25:00 -0800 Subject: Shutdown tylan1 SNF 2011-02-24 13:22:53: shutdown until TCACLEAN Message-ID: TLC complete From latta at snf.stanford.edu Wed Mar 2 14:44:31 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 2 Mar 2011 14:44:31 -0800 Subject: Comment tylan1 SNF 2011-03-02 14:23:30: tlc completed no problem Message-ID: archived From latta at snf.stanford.edu Wed Mar 2 14:44:49 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 2 Mar 2011 14:44:49 -0800 Subject: Comment tylan1 SNF 2011-03-02 11:19:29: Running TLC clean Message-ID: Made it without error! From latta at snf.stanford.edu Wed Mar 2 14:45:11 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 2 Mar 2011 14:45:11 -0800 Subject: Comment tylan1 SNF 2011-02-28 12:30:36: Tube replaced Message-ID: archived From latta at snf.stanford.edu Wed Mar 2 14:45:27 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 2 Mar 2011 14:45:27 -0800 Subject: Comment tylan1 SNF 2011-02-18 20:54:52: MFS error Message-ID: should be ok now From tberg at snf.stanford.edu Fri Mar 4 12:02:54 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 4 Mar 2011 12:02:54 -0800 Subject: Shutdown tylan1 SNF 2011-03-04 12:02:53: Power Fail MFS alarms Message-ID: From seymour at snf.stanford.edu Fri Mar 25 11:32:52 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 25 Mar 2011 11:32:52 -0700 Subject: Shutdown tylan1 SNF 2011-03-04 12:02:53: Power Fail MFS alarms Message-ID: installed repaired controller and check operation of all gases and mfc zeros. running tlcclean recipe From seymour at snf.stanford.edu Fri Mar 25 11:33:18 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 25 Mar 2011 11:33:18 -0700 Subject: Problem tylan1 SNF 2011-03-25 11:33:18: running tlcclean after repair Message-ID: From seymour at snf.stanford.edu Fri Mar 25 15:12:00 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 25 Mar 2011 15:12:00 -0700 Subject: Problem tylan1 SNF 2011-03-25 11:33:18: running tlcclean after repair Message-ID: TLCCLEAN completed. From seymour at snf.stanford.edu Fri Mar 25 15:13:51 2011 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 25 Mar 2011 15:13:51 -0700 Subject: Problem tylan1 SNF 2011-03-25 15:13:51: Tube controller is working Message-ID: TLCCLEAN completed. test needed for thickness results From tberg at snf.stanford.edu Tue Mar 29 06:19:50 2011 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 29 Mar 2011 06:19:50 -0700 Subject: Problem tylan1 SNF 2011-03-25 15:13:51: Tube controller is working Message-ID: Severalusers have run no problems From latta at snf.stanford.edu Thu Mar 31 14:20:09 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 31 Mar 2011 14:20:09 -0700 Subject: Comment tylan1 SNF 2011-03-31 14:20:09: Qual for April and after repair Message-ID: WET900 00:39:00 50 wafer spread (expect about 1070A) Front = 1069A, Std Dev = 9.1 Front Center = 1066A, Std Dev = 7.2 Back Center = 1078A, Std Dev = 5.1 Back = 1086A, Std Dev = 5.4 Average All = 1075A From latta at snf.stanford.edu Thu Mar 31 14:20:31 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 31 Mar 2011 14:20:31 -0700 Subject: Comment tylan1 SNF 2011-01-26 17:24:48: Qual after repair Message-ID: newer qual posted. From latta at snf.stanford.edu Thu Mar 31 14:23:43 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 31 Mar 2011 14:23:43 -0700 Subject: Comment tylan1 SNF 2011-03-31 14:23:42: mixing chamber- keep an eye on Message-ID: April and post repair qual looks good- just 20A over a 50 wafer spread! The mixing chamber (the disk at the back of the cantilever assembly) looks like it is thinking about developing a crack. It may need to be replaced in the near future....