From seymour at snf.stanford.edu  Mon May  2 08:28:43 2011
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Mon, 2 May 2011 08:28:43 -0700
Subject: Comment tylan1 SNF 2011-05-02 08:28:42: found tube with I/O error
Message-ID: <mailman.986.1357938812.25926.tylan1-pcs@snf.stanford.edu>

rebooted slave computer and loaded wet800. Recipe loaded normally and N2 flows and element setpoints came on and all looks normal. 



From latta at snf.stanford.edu  Thu May  5 14:44:22 2011
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Thu, 5 May 2011 14:44:22 -0700
Subject: Comment tylan1 SNF 2011-05-05 14:44:21: May quals
Message-ID: <mailman.987.1357938812.25926.tylan1-pcs@snf.stanford.edu>

WET900  00:39:00  50 wafer spread
  (expect about 1070A)
Front = 1111A, Std Dev = 5.3
Front Center = 1103A, Std Dev = 6.0
Back Center = 1102A, Std Dev = 7.0
Back = 11113A, Std Dev = 6.2
Average All = 1108A



From latta at snf.stanford.edu  Thu May  5 14:44:37 2011
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Thu, 5 May 2011 14:44:37 -0700
Subject: Comment tylan1 SNF 2011-03-31 14:20:09: Qual for April and after repair 
Message-ID: <mailman.988.1357938812.25926.tylan1-pcs@snf.stanford.edu>

archived



From latta at snf.stanford.edu  Thu May  5 14:44:50 2011
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Thu, 5 May 2011 14:44:50 -0700
Subject: Comment tylan1 SNF 2011-04-05 10:24:06: lots of silicon(?) particles in boats
Message-ID: <mailman.989.1357938812.25926.tylan1-pcs@snf.stanford.edu>

looks clean now



From seymour at snf.stanford.edu  Fri May  6 09:56:52 2011
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Fri, 6 May 2011 09:56:52 -0700
Subject: Comment tylan1 SNF 2011-05-06 09:56:52: changed translc bubbler
Message-ID: <mailman.990.1357938812.25926.tylan1-pcs@snf.stanford.edu>




From seymour at snf.stanford.edu  Fri May  6 09:57:24 2011
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Fri, 6 May 2011 09:57:24 -0700
Subject: Comment tylan1 SNF 2011-05-06 09:56:52: changed translc bubbler
Message-ID: <mailman.991.1357938812.25926.tylan1-pcs@snf.stanford.edu>

archived



From wanglele501 at snf.stanford.edu  Tue May 17 13:21:26 2011
From: wanglele501 at snf.stanford.edu (wanglele501 at snf.stanford.edu)
Date: Tue, 17 May 2011 13:21:26 -0700
Subject: Problem tylan1 SNF 2011-05-17 13:21:25: TCU I/O error
Message-ID: <mailman.992.1357938812.25926.tylan1-pcs@snf.stanford.edu>




From seymour at snf.stanford.edu  Tue May 17 13:46:03 2011
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Tue, 17 May 2011 13:46:03 -0700
Subject: Problem tylan1 SNF 2011-05-17 13:21:25: TCU I/O error
Message-ID: <mailman.993.1357938812.25926.tylan1-pcs@snf.stanford.edu>

reset tcu element heating up to idle setpoint



From kokab at snf.stanford.edu  Tue May 24 07:43:32 2011
From: kokab at snf.stanford.edu (kokab at snf.stanford.edu)
Date: Tue, 24 May 2011 07:43:32 -0700
Subject: Problem tylan1 SNF 2011-05-24 07:43:31: same problem with tylan1
Message-ID: <mailman.994.1357938812.25926.tylan1-pcs@snf.stanford.edu>




From takane at snf.stanford.edu  Tue May 24 19:01:07 2011
From: takane at snf.stanford.edu (takane at snf.stanford.edu)
Date: Tue, 24 May 2011 19:01:07 -0700
Subject: Comment tylan1 SNF 2011-05-24 19:01:06: did not observe any spots
Message-ID: <mailman.995.1357938812.25926.tylan1-pcs@snf.stanford.edu>




From tberg at snf.stanford.edu  Wed May 25 05:56:26 2011
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Wed, 25 May 2011 05:56:26 -0700
Subject: Problem tylan1 SNF 2011-05-24 07:43:31: same problem with tylan1
Message-ID: <mailman.996.1357938812.25926.tylan1-pcs@snf.stanford.edu>

It looks like issues were with wafers not the furnace. Next user had no problems.