From jaehlee at snf.stanford.edu  Wed Apr  4 13:09:16 2012
From: jaehlee at snf.stanford.edu (jaehlee at snf.stanford.edu)
Date: Wed, 4 Apr 2012 13:09:16 -0700
Subject: Comment tylan1 SNF 2012-04-04 13:09:15: will be switched to Ar 4/5 6 AM - 4/6 9 AM
Message-ID: <mailman.1060.1357938812.25926.tylan1-pcs@snf.stanford.edu>

thank you!



From tberg at snf.stanford.edu  Thu Apr  5 06:49:47 2012
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Thu, 5 Apr 2012 06:49:47 -0700
Subject: Problem tylan1 SNF 2012-04-05 06:49:46: System is now in Argon for JAELEE
Message-ID: <mailman.1061.1357938812.25926.tylan1-pcs@snf.stanford.edu>




From tberg at snf.stanford.edu  Fri Apr  6 07:27:58 2012
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Fri, 6 Apr 2012 07:27:58 -0700
Subject: Problem tylan1 SNF 2012-04-05 06:49:46: System is now in Argon for JAELEE
Message-ID: <mailman.1062.1357938812.25926.tylan1-pcs@snf.stanford.edu>

System switched back to N2



From bchui at snf.stanford.edu  Thu Apr 26 19:45:50 2012
From: bchui at snf.stanford.edu (bchui at snf.stanford.edu)
Date: Thu, 26 Apr 2012 19:45:50 -0700
Subject: Problem tylan1 SNF 2012-04-26 19:45:49: Slow oxidation rate
Message-ID: <mailman.1063.1357938812.25926.tylan1-pcs@snf.stanford.edu>

Same problem as calvinli.  Ran WET1000 for 38 min, expected 2800A only got 1300A (but uniform across wafer)



From seymour at snf.stanford.edu  Fri Apr 27 08:37:39 2012
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Fri, 27 Apr 2012 08:37:39 -0700
Subject: Problem tylan1 SNF 2012-04-26 19:45:49: Slow oxidation rate
Message-ID: <mailman.1064.1357938812.25926.tylan1-pcs@snf.stanford.edu>

cleaned and adjusted door position. needs test



From seymour at snf.stanford.edu  Fri Apr 27 08:38:05 2012
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Fri, 27 Apr 2012 08:38:05 -0700
Subject: Problem tylan1 SNF 2012-04-24 11:06:31: grow rate
Message-ID: <mailman.1065.1357938812.25926.tylan1-pcs@snf.stanford.edu>

cleaned and adjusted door seal



From seymour at snf.stanford.edu  Fri Apr 27 08:38:27 2012
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Fri, 27 Apr 2012 08:38:27 -0700
Subject: Problem tylan1 SNF 2012-04-27 08:38:26: needs test after door seal  work.
Message-ID: <mailman.1066.1357938812.25926.tylan1-pcs@snf.stanford.edu>




From seymour at snf.stanford.edu  Fri Apr 27 11:14:01 2012
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Fri, 27 Apr 2012 11:14:01 -0700
Subject: Shutdown tylan1 SNF 2012-04-27 11:14:01: loader dragging on bottom of tube
Message-ID: <mailman.1067.1357938812.25926.tylan1-pcs@snf.stanford.edu>