Problem tylan1 SNF 2012-04-26 19:45:49: Slow oxidation rate

bchui at snf.stanford.edu bchui at snf.stanford.edu
Thu Apr 26 19:45:50 PDT 2012


Same problem as calvinli.  Ran WET1000 for 38 min, expected 2800A only got 1300A (but uniform across wafer)




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