From latta at snf.stanford.edu Tue Feb 7 17:27:52 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 7 Feb 2012 17:27:52 -0800 Subject: Shutdown tylan1 SNF 2011-12-13 14:00:29: renovation Message-ID: reno over, we hope. From latta at snf.stanford.edu Tue Feb 7 17:28:03 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 7 Feb 2012 17:28:03 -0800 Subject: Problem tylan1 SNF 2011-12-10 00:56:50: No message in the window Message-ID: Fixed From latta at snf.stanford.edu Tue Feb 7 17:30:31 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 7 Feb 2012 17:30:31 -0800 Subject: Comment tylan1 SNF 2012-02-07 17:30:30: Feb quals Message-ID: WET900 00:39:00 50 wafer spread (expect about 1070A) Front = 1028A, Std Dev = 8.0 Front Center = 1047A, Std Dev = 5.6 Back Center = not run Back = 1107A, Std Dev = 8.4 Average All = 1061A Wafer -to-wafer uniformity not so good. From latta at snf.stanford.edu Tue Feb 7 17:30:44 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 7 Feb 2012 17:30:44 -0800 Subject: Comment tylan1 SNF 2011-12-01 15:53:54: Dec quals Message-ID: newer quals run From latta at snf.stanford.edu Tue Feb 7 17:31:21 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 7 Feb 2012 17:31:21 -0800 Subject: Problem tylan1 SNF 2012-02-07 17:31:21: wafer to wafer uniformity not good Message-ID: temp issue? From seymour at snf.stanford.edu Thu Feb 9 06:55:03 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 9 Feb 2012 06:55:03 -0800 Subject: Comment tylan1 SNF 2012-02-09 06:55:02: I checked TCU board back up T/C values Message-ID: The TCU board looked okay. I then checked the injector port fitting and found it needed tighting which I did. From latta at snf.stanford.edu Tue Feb 14 15:54:46 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 14 Feb 2012 15:54:46 -0800 Subject: Comment tylan1 SNF 2012-02-14 15:54:45: Feb qual re-test Message-ID: WET900 00:39:00 50 wafer spread (expect about 1070A) Front = 1010A, Std Dev = 9.1 Front Center = 1011A, Std Dev = 7.6 Back Center = 1021A, Std Dev = 6.4 Back = 1042A, Std Dev = 5.8 Average All = 1021A From latta at snf.stanford.edu Tue Feb 14 15:55:00 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 14 Feb 2012 15:55:00 -0800 Subject: Comment tylan1 SNF 2012-02-07 17:30:30: Feb quals Message-ID: new, better quals posted From latta at snf.stanford.edu Tue Feb 14 15:55:20 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 14 Feb 2012 15:55:20 -0800 Subject: Problem tylan1 SNF 2012-02-07 17:31:21: wafer to wafer uniformity not good Message-ID: cleared up by tightening injector From latta at snf.stanford.edu Tue Feb 14 15:55:33 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 14 Feb 2012 15:55:33 -0800 Subject: Comment tylan1 SNF 2012-02-09 06:55:02: I checked TCU board back up T/C values Message-ID: Did the trick! From lindaw at snf.stanford.edu Mon Feb 20 13:26:54 2012 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 20 Feb 2012 13:26:54 -0800 Subject: Problem tylan1 SNF 2012-02-20 13:26:53: tube 001 shows I/O error on tylan console Message-ID: while loading recipe for another tube, I noticed that a tube 001 error kept randomly posting on the console. tube 001 I/O error From seymour at snf.stanford.edu Tue Feb 21 10:19:42 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 21 Feb 2012 10:19:42 -0800 Subject: Problem tylan1 SNF 2012-02-20 13:26:53: tube 001 shows I/O error on tylan console Message-ID: tube alarming for no auto. reset alarm and tube flowed N2 and did not alarm for no auto From latta at snf.stanford.edu Wed Feb 29 16:27:10 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 29 Feb 2012 16:27:10 -0800 Subject: Comment tylan1 SNF 2012-02-29 16:27:09: Mar (late Feb) quals Message-ID: WET900 00:39:00 50 wafer spread (expect about 1070A) Front = 1017A, Std Dev = 9.8 Front Center = 1024A, Std Dev = 7.2 Back Center = 1034A, Std Dev = 6.9 Back = 1056A, Std Dev = 5.7 Average All = 1033A From latta at snf.stanford.edu Wed Feb 29 16:27:21 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 29 Feb 2012 16:27:21 -0800 Subject: Comment tylan1 SNF 2012-02-14 15:54:45: Feb qual re-test Message-ID: archived