From latta at snf.stanford.edu  Tue Jul 17 16:28:17 2012
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Tue, 17 Jul 2012 16:28:17 -0700
Subject: Problem tylan1 SNF 2012-07-17 16:28:17: Jul quals
Message-ID: <mailman.1095.1357938813.25926.tylan1-pcs@snf.stanford.edu>

WET900  00:39:00  50 wafer spread
  (expect about 1070A)
Front = 951A, Std Dev = 5.7
Front Center = 967A, Std Dev = 7.8
Back Center = 985A, Std Dev = 7.6
Back = 1008A, Std Dev = 6.4
Average All = 978A



From latta at snf.stanford.edu  Tue Jul 17 16:28:26 2012
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Tue, 17 Jul 2012 16:28:26 -0700
Subject: Comment tylan1 SNF 2012-06-12 13:32:35: June qual
Message-ID: <mailman.1096.1357938813.25926.tylan1-pcs@snf.stanford.edu>

archived



From seymour at snf.stanford.edu  Wed Jul 18 11:53:31 2012
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Wed, 18 Jul 2012 11:53:31 -0700
Subject: Problem tylan1 SNF 2012-07-17 16:28:17: Jul quals
Message-ID: <mailman.1097.1357938813.25926.tylan1-pcs@snf.stanford.edu>

checked torch and it looked good. i removed loader replaced door seal and moved door seal up on door to allow a wider area to seal. heating element up and running tlcclean.



From seymour at snf.stanford.edu  Wed Jul 18 11:54:29 2012
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Wed, 18 Jul 2012 11:54:29 -0700
Subject: Problem tylan1 SNF 2012-07-18 11:54:29: running tlcclean after repair
Message-ID: <mailman.1098.1357938813.25926.tylan1-pcs@snf.stanford.edu>

will need test for uniformity after clean



From latta at snf.stanford.edu  Thu Jul 19 15:07:33 2012
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Thu, 19 Jul 2012 15:07:33 -0700
Subject: Problem tylan1 SNF 2012-07-18 11:54:29: running tlcclean after repair
Message-ID: <mailman.1099.1357938813.25926.tylan1-pcs@snf.stanford.edu>

test run and posted



From latta at snf.stanford.edu  Thu Jul 19 15:09:49 2012
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Thu, 19 Jul 2012 15:09:49 -0700
Subject: Comment tylan1 SNF 2012-07-19 15:09:48: Qual after door adjustment
Message-ID: <mailman.1100.1357938813.25926.tylan1-pcs@snf.stanford.edu>

WET900  00:39:00  50 wafer spread
  (expect about 1070A)
Front = 1004A, Std Dev = 6.7
Front Center = 1004A, Std Dev = 6.3
Back Center = 1015A, Std Dev = 5.7
Back = 1031A, Std Dev = 6.0
Average All = 1014A