From seymour at snf.stanford.edu Tue May 1 11:42:43 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 1 May 2012 11:42:43 -0700 Subject: Comment tylan1 SNF 2012-05-01 11:42:42: Message-ID: From seymour at snf.stanford.edu Tue May 1 11:42:56 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 1 May 2012 11:42:56 -0700 Subject: Comment tylan1 SNF 2012-05-01 11:42:42: Message-ID: From seymour at snf.stanford.edu Tue May 1 11:45:14 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 1 May 2012 11:45:14 -0700 Subject: Shutdown tylan1 SNF 2012-04-27 11:14:01: loader dragging on bottom of tube Message-ID: replaced loader sheath, burn chamber and door seal. aligned loader. running tlcclean From seymour at snf.stanford.edu Tue May 1 11:45:52 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 1 May 2012 11:45:52 -0700 Subject: Comment tylan1 SNF 2012-05-01 11:45:51: running tlcclean after repair Message-ID: From latta at snf.stanford.edu Wed May 2 16:33:35 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 2 May 2012 16:33:35 -0700 Subject: Problem tylan1 SNF 2012-05-02 16:33:34: Qual after alignment- appears no wet ox Message-ID: WET900 00:39:00 50 wafer spread (expect about 1070A) Front = 413A, Std Dev = 3.7 Front Center = 433A, Std Dev = 4.7 Back Center = 448A, Std Dev = 4.9 Back = 463A, Std Dev = 5.8 Average All = 439A From latta at snf.stanford.edu Wed May 2 16:33:56 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 2 May 2012 16:33:56 -0700 Subject: Comment tylan1 SNF 2012-04-04 13:09:15: will be switched to Ar 4/5 6 AM - 4/6 9 AM Message-ID: archived From latta at snf.stanford.edu Wed May 2 16:34:15 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 2 May 2012 16:34:15 -0700 Subject: Problem tylan1 SNF 2012-04-27 08:38:26: needs test after door seal work. Message-ID: test posted From latta at snf.stanford.edu Wed May 2 16:34:27 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 2 May 2012 16:34:27 -0700 Subject: Comment tylan1 SNF 2012-05-01 11:45:51: running tlcclean after repair Message-ID: archived From ysohn at snf.stanford.edu Thu May 3 09:00:59 2012 From: ysohn at snf.stanford.edu (ysohn at snf.stanford.edu) Date: Thu, 3 May 2012 09:00:59 -0700 Subject: Problem tylan1 SNF 2012-05-03 09:00:58: growth rate Message-ID: wet1100 recipe was run for 12:40:00. Expected thermal oxide thickness was 25000A, but I only got about 8400 A. did 5 point measruement, and std across the wafer looks fine. (about 80A) From latta at snf.stanford.edu Thu May 3 09:52:56 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 3 May 2012 09:52:56 -0700 Subject: Problem tylan1 SNF 2012-05-03 09:52:56: Use only for Dry Oxidation or Annealing Message-ID: Wet oxidations are not working at this point, no steam. We will post on coral when the tube is fully functional again. From latta at snf.stanford.edu Thu May 3 09:53:26 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 3 May 2012 09:53:26 -0700 Subject: Problem tylan1 SNF 2012-05-03 09:00:58: growth rate Message-ID: Yes, confirms qual. From seymour at snf.stanford.edu Mon May 7 07:17:49 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 7 May 2012 07:17:49 -0700 Subject: Shutdown tylan1 SNF 2012-05-07 07:17:48: torch broken Message-ID: From seymour at snf.stanford.edu Tue May 8 10:11:16 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 8 May 2012 10:11:16 -0700 Subject: Shutdown tylan1 SNF 2012-05-07 07:17:48: torch broken Message-ID: replaced tube and torch. running tlcclean. From seymour at snf.stanford.edu Tue May 8 10:11:49 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 8 May 2012 10:11:49 -0700 Subject: Problem tylan1 SNF 2012-05-03 09:52:56: Use only for Dry Oxidation or Annealing Message-ID: tube and torch replaced From latta at snf.stanford.edu Tue May 8 17:51:43 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 8 May 2012 17:51:43 -0700 Subject: Comment tylan1 SNF 2012-05-08 17:51:42: May qual- looks ok Message-ID: WET900 00:39:00 50 wafer spread (expect about 1070A) Front = 1071A, Std Dev = 20.7 Front Center = 1054A, Std Dev = 18.2 Back Center = 1057A, Std Dev = 18.6 Back = 1088A, Std Dev = 18.4 Average All = 1068A Std dev too high After torch and tube change From latta at snf.stanford.edu Tue May 8 17:52:42 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 8 May 2012 17:52:42 -0700 Subject: Comment tylan1 SNF 2012-02-29 16:27:09: Mar (late Feb) quals Message-ID: newer quals posted From latta at snf.stanford.edu Tue May 8 17:53:55 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 8 May 2012 17:53:55 -0700 Subject: Problem tylan1 SNF 2012-05-02 16:33:34: Qual after alignment- appears no wet ox Message-ID: thicknesses closer to normal, but std devs high, door tweak, perhaps? From latta at snf.stanford.edu Tue May 8 17:55:08 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 8 May 2012 17:55:08 -0700 Subject: Problem tylan1 SNF 2012-05-08 17:55:07: Oxide thickness is much better..... Message-ID: ... but std dev is high. Use furnace for non-critical work until further notice. From latta at snf.stanford.edu Wed May 16 11:48:23 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 16 May 2012 11:48:23 -0700 Subject: Comment tylan1 SNF 2012-05-16 11:48:22: Re-qual after door adjustment Message-ID: WET900 00:39:00 50 wafer spread (expect about 1070A) Front = 1020A, Std Dev = 8.4 Front Center = 1042A, Std Dev = 9.4 Back Center = 1061A, Std Dev = 8.7 Back = 1090A, Std Dev = 10.3 Average All = 1053A From latta at snf.stanford.edu Wed May 16 11:48:43 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 16 May 2012 11:48:43 -0700 Subject: Comment tylan1 SNF 2012-05-08 17:51:42: May qual- looks ok Message-ID: newer, better quals posted From latta at snf.stanford.edu Wed May 16 11:49:55 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 16 May 2012 11:49:55 -0700 Subject: Problem tylan1 SNF 2012-05-08 17:55:07: Oxide thickness is much better..... Message-ID: std dev better after re-qual