Problem tylan1 SNF 2012-05-03 09:00:58: growth rate

ysohn at snf.stanford.edu ysohn at snf.stanford.edu
Thu May 3 09:00:59 PDT 2012


wet1100 recipe was run for 12:40:00.
Expected thermal oxide thickness was 25000A, but I only got about 8400 A.
did 5 point measruement, and std across the wafer looks fine. (about 80A)




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