From ericp at snf.stanford.edu Fri Jan 11 13:13:24 2013 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Apr 14, 2000 Subject: Problem tylan1: Did not get up to temp?? Message-ID: Ran WET1150, and wafers came out with much less than target thickness oxide. When I checked status, tc's reported near 1150 temp, but tube was not "glowing". Alkso, tc's continued to report ~1150C even after pulling tube. TCU's reported 100% power? From gaul at snf.stanford.edu Fri Jan 11 13:13:24 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Apr 14, 2000 Subject: Problem Clear tylan1: Reset TCU Message-ID: From gaul at snf.stanford.edu Fri Jan 11 13:13:24 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Apr 17, 2000 Subject: Problem Clear tylan1: O.K. now Message-ID: From price at snf.stanford.edu Fri Jan 11 13:13:24 2013 From: price at snf.stanford.edu (price at snf.stanford.edu) Date: Apr 27, 2000 Subject: Problem tylan1: Fur status Indicator off Message-ID: From latta at snf.stanford.edu Fri Jan 11 13:13:24 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: May 2, 2000 Subject: Problem Clear tylan1: looks good! Message-ID: From kalavade at snf.stanford.edu Fri Jan 11 13:13:24 2013 From: kalavade at snf.stanford.edu (kalavade at snf.stanford.edu) Date: Jun 1, 2000 Subject: Shutdown tylan1: Message-ID: TCU Error- The temperature read out is 0 C. From gaul at snf.stanford.edu Fri Jan 11 13:13:24 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Jun 2, 2000 Subject: Shutdown Clear tylan1: Reset breaker Message-ID: From tui3 at snf.stanford.edu Fri Jan 11 13:13:24 2013 From: tui3 at snf.stanford.edu (tui3 at snf.stanford.edu) Date: Jul 28, 2000 Subject: Problem tylan1: Message-ID: Furnace sometimes gets stuck when retracting. From emc at snf.stanford.edu Fri Jan 11 13:13:24 2013 From: emc at snf.stanford.edu (emc at snf.stanford.edu) Date: Aug 8, 2000 Subject: Shutdown tylan1: tube stuck! Message-ID: From gaul at snf.stanford.edu Fri Jan 11 13:13:24 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Aug 14, 2000 Subject: Shutdown Clear tylan1: Replaced bushings Message-ID: From gaul at snf.stanford.edu Fri Jan 11 13:13:24 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Aug 14, 2000 Subject: Problem Clear tylan1: Replaced bushings Message-ID: From gaul at snf.stanford.edu Fri Jan 11 13:13:24 2013 From: gaul at snf.stanford.edu (gaul at snf.stanford.edu) Date: Aug 21, 2000 Subject: Shutdown tylan1: Door interlock not being made Message-ID: From maurice at snf.stanford.edu Fri Jan 11 13:13:24 2013 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:13:24 -0000 Subject: Shutdown tylan1 SNF 2012-08-17 16:23:29: no cool water Message-ID: <18072366.160.1345245810072.JavaMail.coral@shine> From tberg at snf.stanford.edu Fri Jan 11 13:13:24 2013 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:13:24 -0000 Subject: Shutdown tylan1 SNF 2012-08-17 16:23:29: no cool water Message-ID: <5182915.24.1345480170489.JavaMail.coral@shine> cooling water and breaker back on-at temp From cachang at snf.stanford.edu Fri Jan 11 13:13:24 2013 From: cachang at snf.stanford.edu (cachang at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:13:24 -0000 Subject: Problem tylan1 SNF 2012-08-21 15:10:06: MFS alarm Message-ID: <12813557.28.1345587007387.JavaMail.coral@shine> From latta at snf.stanford.edu Fri Jan 11 13:13:24 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:13:24 -0000 Subject: Problem tylan1 SNF 2012-08-21 15:23:21: Temp interlock error during qual Message-ID: <9157440.30.1345587801318.JavaMail.coral@shine> At step 25 (wet ox) From latta at snf.stanford.edu Fri Jan 11 13:13:24 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:13:24 -0000 Subject: Problem tylan1 SNF 2012-08-21 15:10:06: MFS alarm Message-ID: <17144474.33.1345587875934.JavaMail.coral@shine> posted more details From seymour at snf.stanford.edu Fri Jan 11 13:13:24 2013 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:13:24 -0000 Subject: Problem tylan1 SNF 2012-08-21 15:23:21: Temp interlock error during qual Message-ID: <8784669.34.1345588107618.JavaMail.coral@shine> temp interlock problem ok now From latta at snf.stanford.edu Fri Jan 11 13:13:24 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:13:24 -0000 Subject: Comment tylan1 SNF 2012-08-24 13:06:40: Aug Qual Message-ID: <16898200.144.1345838801146.JavaMail.coral@shine> WET900 00:39:00 50 wafer spread (expect about 1070A) Front = 1031A, Std Dev = 7.8 Front Center = 1029A, Std Dev = 6.6 Back Center = 1039A, Std Dev = 5.7 Back = 1061A, Std Dev = 6.1 Average All = 1040A From latta at snf.stanford.edu Fri Jan 11 13:13:24 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:13:24 -0000 Subject: Comment tylan1 SNF 2012-07-19 15:09:48: Qual after door adjustment Message-ID: <32302630.145.1345838816254.JavaMail.coral@shine> newer qual posted From tberg at snf.stanford.edu Fri Jan 11 13:13:24 2013 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:13:24 -0000 Subject: Problem tylan1 SNF 2012-09-10 11:48:16: switching to Ar for user Message-ID: <6999681.51.1347302897468.JavaMail.coral@shine> switching to Ar for user until tomorrow From tberg at snf.stanford.edu Fri Jan 11 13:13:24 2013 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:13:24 -0000 Subject: Problem tylan1 SNF 2012-09-10 11:48:16: switching to Ar for user Message-ID: <19349736.80.1347394645303.JavaMail.coral@shine> back to n2 From latta at snf.stanford.edu Fri Jan 11 13:13:24 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:13:24 -0000 Subject: Problem tylan1 SNF 2012-11-02 15:13:27: Nov Quals Message-ID: <8392875.192.1351894408045.JavaMail.coral@shine> WET900 00:39:00 50 wafer spread (expect about 1070A) Front = 1012A, Std Dev = 8.4 Front Center = 1004A, Std Dev = 6.1 Back Center = 1014A, Std Dev = 5.1 Back = 1033A, Std Dev = 5.4 Average All = 1016A From latta at snf.stanford.edu Fri Jan 11 13:13:24 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:13:24 -0000 Subject: Comment tylan1 SNF 2012-11-02 15:20:02: Nov quals Message-ID: <7726384.193.1351894803229.JavaMail.coral@shine> WET900 00:39:00 50 wafer spread (expect about 1070A) Front = 1012A, Std Dev = 8.4 Front Center = 1004A, Std Dev = 6.1 Back Center = 1014A, Std Dev = 5.1 Back = 1033A, Std Dev = 5.4 Average All = 1016A From latta at snf.stanford.edu Fri Jan 11 13:13:24 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:13:24 -0000 Subject: Problem tylan1 SNF 2012-11-02 15:13:27: Nov Quals Message-ID: <3691525.194.1351894914248.JavaMail.coral@shine> wrong place- should have been a comment From latta at snf.stanford.edu Fri Jan 11 13:13:24 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:13:24 -0000 Subject: Comment tylan1 SNF 2012-08-24 13:06:40: Aug Qual Message-ID: <25545419.195.1351894929255.JavaMail.coral@shine> new quals posted From cbaxter at snf.stanford.edu Fri Jan 11 13:13:24 2013 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:13:24 -0000 Subject: Shutdown tylan1 SNF 2012-11-10 19:01:17: Overtemp Message-ID: <29690336.47.1352602878098.JavaMail.coral@shine> The overtemp switch interlock tripped.. From tberg at snf.stanford.edu Fri Jan 11 13:13:24 2013 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:13:24 -0000 Subject: Comment tylan1 SNF 2012-11-12 07:26:47: Reset overtemp- observing Message-ID: <14628397.18.1352734008451.JavaMail.coral@shine> From seymour at snf.stanford.edu Fri Jan 11 13:13:24 2013 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:13:24 -0000 Subject: Shutdown tylan1 SNF 2012-11-10 19:01:17: Overtemp Message-ID: <17474178.1.1352745612676.JavaMail.coral@shine> ran tube up in manual to 800 and then to 1050 and no overtemp problems pr alarms From latta at snf.stanford.edu Fri Jan 11 13:13:24 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:13:24 -0000 Subject: Comment tylan1 SNF 2012-11-12 07:26:47: Reset overtemp- observing Message-ID: <11825662.9.1354237696126.JavaMail.coral@shine> noted From latta at snf.stanford.edu Fri Jan 11 13:13:24 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:13:24 -0000 Subject: Comment tylan1 SNF 2012-11-29 17:10:57: Dec quals Message-ID: <23526878.10.1354237857686.JavaMail.coral@shine> WET900 00:39:00 50 wafer spread (expect about 1070A) Front = 981A, Std Dev = 10.6 Front Center = 980A, Std Dev = 7.7 Back Center = 1001A, Std Dev = 5.8 Back = 1036A, Std Dev = 6.0 Average All = 1000A From latta at snf.stanford.edu Fri Jan 11 13:13:24 2013 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:13:24 -0000 Subject: Comment tylan1 SNF 2012-11-02 15:20:02: Nov quals Message-ID: <9458290.11.1354237904145.JavaMail.coral@shine> newer quals posted From paulyoon at snf.stanford.edu Fri Jan 11 13:13:24 2013 From: paulyoon at snf.stanford.edu (paulyoon at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:13:24 -0000 Subject: Shutdown tylan1 SNF 2012-12-04 11:07:41: quartz parts are staying inside. Message-ID: <11906092.5.1354648062091.JavaMail.coral@shine> When I ran WET950 recipe, the tool made cracking sound, and now quartz parts are staying inside. So I pressed abort button immediately. Now boat is out around half. From seymour at snf.stanford.edu Fri Jan 11 13:13:24 2013 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:13:24 -0000 Subject: Comment tylan1 SNF 2012-12-04 12:01:17: replaced and tightened loader bearing Message-ID: <12191562.8.1354651277460.JavaMail.coral@shine> door flag needs adjustment and TRANSLC clean needs to be ran before using. From seymour at snf.stanford.edu Fri Jan 11 13:13:24 2013 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:13:24 -0000 Subject: Shutdown tylan1 SNF 2012-12-04 11:07:41: quartz parts are staying inside. Message-ID: <23319048.11.1354661742589.JavaMail.coral@shine> loader ok now. i am running tlcclean at this time. From seymour at snf.stanford.edu Fri Jan 11 13:13:24 2013 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:13:24 -0000 Subject: Comment tylan1 SNF 2012-12-04 14:56:14: running tlcclean after repair Message-ID: <184163.12.1354661774898.JavaMail.coral@shine> From popomoo at snf.stanford.edu Fri Jan 11 13:13:24 2013 From: popomoo at snf.stanford.edu (popomoo at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:13:24 -0000 Subject: Problem tylan1 SNF 2012-12-04 17:12:48: tube does not come out Message-ID: <12203633.29.1354669968647.JavaMail.coral@shine> From popomoo at snf.stanford.edu Fri Jan 11 13:13:24 2013 From: popomoo at snf.stanford.edu (popomoo at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:13:24 -0000 Subject: Comment tylan1 SNF 2012-12-04 17:15:22: it is now working Message-ID: <1901666.30.1354670123120.JavaMail.coral@shine> I aborted and restarted a couple of times, and suddenly the tube started to come out. From maurice at snf.stanford.edu Fri Jan 11 13:13:24 2013 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 11 Jan 2013 21:13:24 -0000 Subject: Problem tylan1 SNF 2012-12-04 17:12:48: tube does not come out Message-ID: <15558112.13.1354732122332.JavaMail.coral@shine> User restarted recipe...it worked