From caudillomalik at netscape.net  Thu Jul 12 16:50:30 2001
From: caudillomalik at netscape.net (David Caudillo)
Date: Thu, 12 Jul 2001 19:50:30 -0400
Subject: Tylan#1 shutdown
Message-ID: <68568315.21BE17DB.0DC3DFDB@netscape.net>

center zone is out.
--
David Caudillo


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From seymour at snf.stanford.edu  Tue Jul 17 08:38:47 2001
From: seymour at snf.stanford.edu (Ray Seymour)
Date: Tue, 17 Jul 2001 08:38:47 -0700
Subject: removing shutdown
Message-ID: <3B545C06.95C70EF7@snf.stanford.edu>

The load zone is running a little cold  but the oxidation that was done
last was prettty uniform as per Eric. I will leave the tool up for use
until the faulty part can be replaced. The center zone temp is flat and
the wafers are in the center zone.
Ray Seymour
4-7425